@article{toshiya,
  title = {Auger Depth Profiling Analyses of InP/GaInAsP Multilayers},
  author = {OGIWARA, Toshiya, TANUMA, Shigeo},
  publisher = {Surface Science Society of Japan},
  year = {2011},
  keywords = {argon ion sputtering, InP/GaInAsP multilayer specimens, Auger depth profiling analysis}
}