# Calculations of Electron Inelastic Mean Free Paths II. Data for 27 Elements over the 50 - 2000 eV Range

https://mdr.nims.go.jp/datasets/d1357535-5b95-41a1-a55a-36458a74fb08

## File

- [IMFP II AuthorMS.pdf](https://mdr.nims.go.jp/filesets/60e97a17-b4ef-41d8-9fe7-f10941c0dbc5/download) ([Detail](https://mdr.nims.go.jp/filesets/60e97a17-b4ef-41d8-9fe7-f10941c0dbc5.md))

## Id

d1357535-5b95-41a1-a55a-36458a74fb08

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-07-12T01:14:49.754445Z

## Updated at

2023-07-12T02:45:58.685679Z

## Published at

2023-07-12T04:30:26.598092Z

## Doi

https://doi.org/10.48505/nims.4217

## First published url

https://doi.org/10.1002/sia.740171304

## Date published

2004-09-15

## Recorded date published

1991-12

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Calculations of Electron Inelastic Mean Free Paths II. Data for 27 Elements
    over the 50 - 2000 eV Range
  title_type: original
  lang: en

## Description

- description: 'We report calculations of electron inelastic mean free paths (IMFPs)
    for 50-2000 eV electrons in a group of 27 elements (C, Mg, Al, Si, Ti, V, Cr,
    Fe, Ni, Cu, Y, Zr, Nb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Os, Ir, Pt, Au and Hi).
    This work extends our previous calculations (Surf. Interface Anal. 11, 577 (1988)
    for the 200 - 2000 eV range. Substantial variations were found in the shapes of
    the IMFP versus energy curves from element to element over the 50 - 200 eV range
    and we attribute these variations to the different inelastic scattering properties
    of each material. Our calculated IMFPs were fitted to a modified form of the Bethe
    equation for inelastic electron scattering in matter; this equation has four parameters.
    These four parameters could be empirically related to several material parameters
    for our group of elements (atomic weight, bulk density and number of valence electron
    per atom). IMFPs were calculated from these empirical expressions, and we found
    that the root mean square difference between these IMFPs and those initially calculated
    was 13%. The modified Bethe equation and our expressions for the four parameters
    can therefore be used to estimate IMFPs in other materials. The uncertainties
    in the algorithm used for our IMFP calculation are difficult to estimate but are
    believed to be largely systematic. Since the same algorithm has been used for
    calculating IMFPs, our predictive IMFP formula is considered to be particularly
    useful for predicting the IMFP dependence on energy in the 50 - 2000 eV range
    and the material dependence for a given energy. '
  description_type: abstract
  lang: en

## Creator

- name: Tanuma, S.
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941
  organization: NIMS
- name: Powell, C. J.
  role: author
  organization: NIST
- name: Penn, D. R.
  role: author
  organization: NIST

## Contact agent

- name: 田沼繁夫
  email: tanuma-sh@tbd.t-com.ne.jp
  orcid: https://orcid.org/0000-0003-2628-9941
  organization: 物質・材料研究機構
  ror: https://ror.org/

## Publisher

organization: Wiely

## Managing organization



## Keyword

- subject: electron inelastic mean free paths
  schema: not_defined
- subject: IMFPs
  schema: not_defined
- subject: a group of 27 elements
  schema: not_defined
- subject: TPP-2
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc/4.0/

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## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Surface and Interface Analysis
  issn: '10969918'
  volume: '17'
  issue: '13'
  start_page: 911
  end_page: 926

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## Fileset

- id: 60e97a17-b4ef-41d8-9fe7-f10941c0dbc5
  filename: IMFP II AuthorMS.pdf
  content_type: application/pdf
  size: 4134475
  md5: 2a6800f368b8fe43c7b9dff5193eba22

## Thumbnail

fileset_id: 60e97a17-b4ef-41d8-9fe7-f10941c0dbc5
filename: IMFP II AuthorMS.pdf