@article{kato, title = {Oxygen reduction for p-type TeOx thin-film transistor}, author = {Seiichi Kato, Masayuki Okamura, Tomomi Sawada, Toshihide Nabatame, Kazuhito Tsukagoshi}, publisher = {AIP Publishing}, year = {2026}, keywords = {oxide transistor, p-type TFT, TeOx, BEOL compatible, reducing agent, tungsten} }