@misc{takayoshi2022a,
  title = {Selective area growth of β-Ga2O3 by HCl-based halide vapor phase epitaxy},
  author = {Takayoshi Oshima, Yuichi Oshima},
  publisher = {IOP Publishing},
  year = {2022-07-01},
  keywords = {Ga2O3, selective area growth}
}