# Developing nickel-catalyzed graphene/diamond heterostructures for  MEMS applications

https://mdr.nims.go.jp/datasets/cf605ba7-0301-4b49-bb0a-d5d8663d73a4

## File

- [JSAP 2025 Abstract-chen_Liao.doc](https://mdr.nims.go.jp/filesets/0b09be67-5a4b-4304-8e37-424f1192df8d/download) ([Detail](https://mdr.nims.go.jp/filesets/0b09be67-5a4b-4304-8e37-424f1192df8d.md))

## Id

cf605ba7-0301-4b49-bb0a-d5d8663d73a4

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## Visibility

open_to_public

## State

published

## Created at

2025-10-15T12:16:52.096403Z

## Updated at

2025-11-06T03:30:32.826944Z

## Published at

2025-11-06T03:24:56.062134Z

## Doi

https://doi.org/10.48505/nims.5858

## First published url



## Date published



## Recorded date published



## Resource type

conference_presentation

## Manuscript type

na

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## Title

- title: Developing nickel-catalyzed graphene/diamond heterostructures for  MEMS applications
  title_type: original
  lang: en

## Description

- description: In this work, we achieved the in-situ growth of graphene on diamond
    (100) substrates via rapid thermal annealing (RTA) at 950°C for 2 minutes, as
    an initial step towards the fabrication of GOD heterostructures for MEMS sensor
    applications. Thin nickel films (10 to 60 nm) were deposited on diamond substrates
    by an E-gun evaporator and served as catalytic layers for graphene growth. After
    annealing, Ni films were chemically removed using aqueous iron (III) chloride
    (FeCl₃) solution. Raman spectrum of the GOD sample exhibited prominent G (~1580 cm⁻¹),
    2D (~2700 cm⁻¹), and diamond (~1332 cm⁻¹) peaks, confirming the successful formation
    of layered graphene on diamond. The full width at half maximum (FWHM) of the 2D
    band was approximately 77 cm⁻¹, and the I2D/IG intensity ratio was about 0.58,
    indicating that the graphene layers formed on the diamond substrate consisted
    of multilayer graphene. Raman spectrum (bottom) of the bare diamond (100) substrate
    was measured as a reference for comparison. These results offer great potential
    for robust and multifunctional diamond  MEMS sensing devices.
  description_type: abstract
  lang: eng

## Creator

- name: Guo Chen
  role: author
  orcid: https://orcid.org/0009-0004-9263-5616
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Wen Zhao
  role: author
  orcid: https://orcid.org/0000-0001-8159-8195
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Zhaozong Zhang
  role: author
  orcid: https://orcid.org/0009-0003-8745-4469
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Satoshi KOIZUMI
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

## Contact agent



## Publisher

organization: 公益社団法人 応用物理学会

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## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

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## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: 2025年第86回応用物理学会秋季学術講演会
start_date: 2025-09-07
end_date: 2025-09-10
identifier: https://meeting.jsap.or.jp/

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## Fileset

- id: 0b09be67-5a4b-4304-8e37-424f1192df8d
  filename: JSAP 2025 Abstract-chen_Liao.doc
  content_type: application/msword
  size: 247296
  md5: d42dcbd8c2548826e6e55d5194da1be6

## Thumbnail

fileset_id: 0b09be67-5a4b-4304-8e37-424f1192df8d
filename: JSAP 2025 Abstract-chen_Liao.doc