@misc{guo-a, title = {Developing nickel-catalyzed graphene/diamond heterostructures for MEMS applications}, author = {Guo Chen, Wen Zhao, Zhaozong Zhang, Satoshi KOIZUMI, Meiyong Liao}, publisher = {公益社団法人 応用物理学会}, year = {}, keywords = {Diamond, MEMS} }