# Thickness Mapping and Layer Number Identification of Exfoliated van der Waals Materials by Fourier Imaging Micro-Ellipsometry

https://mdr.nims.go.jp/datasets/ce7fc56a-c0f5-40cb-9cbe-92fde83aafde

## File

- [acsnano.2c12773.pdf](https://mdr.nims.go.jp/filesets/5be01b5c-93bc-499e-a345-7b8303646179/download) ([Detail](https://mdr.nims.go.jp/filesets/5be01b5c-93bc-499e-a345-7b8303646179.md))

## Id

ce7fc56a-c0f5-40cb-9cbe-92fde83aafde

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-02-13T07:17:49.613942Z

## Updated at

2025-02-14T03:30:58.430377Z

## Published at

2025-02-14T03:30:58.519516Z

## Doi



## First published url

https://doi.org/10.1021/acsnano.2c12773

## Date published

2023-05-23

## Recorded date published

2023-5-23

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Thickness Mapping and Layer Number Identification of Exfoliated van der Waals
    Materials by Fourier Imaging Micro-Ellipsometry
  title_type: original
  lang: en

## Description

- description: As properties of mono- to few layers of exfoliated van der Waals heterostructures
    are heavily dependent on their thicknesses, accurate thickness measurement becomes
    imperative in their study. Commonly used atomic force microscopy and Raman spectroscopy
    techniques may be invasive and produce inconclusive results. Alternatively, spectroscopic
    ellipsometry is limited by tens-of-microns lateral resolution and/or low data
    acquisition rates, inhibiting its utilization for micro-scale exfoliated flakes.
    In this work, we demonstrate a Fourier imaging spectroscopic micro-ellipsometer
    with sub-5 microns lateral resolution along with fast data acquisition rate and
    present angstrom-level accurate and consistent thickness mapping on mono-, bi-
    and trilayers of graphene, hexagonal boron nitride and transition metal dichalcogenide
    (MoS2, WS2, MoSe2, WSe2) flakes. We show that the optical microscope integrated
    ellipsometer can also map minute thickness variations over a micro-scale flake.
    In addition, our system addresses the pertinent issue of identifying monolayer
    thick hBN
  description_type: abstract
  lang: und

## Creator

- name: Ralfy Kenaz
  role: author
- name: Saptarshi Ghosh
  role: author
- name: Pradheesh Ramachandran
  role: author
- name: Kenji Watanabe
  role: author
  orcid: https://orcid.org/0000-0003-3701-8119
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Takashi Taniguchi
  role: author
  orcid: https://orcid.org/0000-0002-1467-3105
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Hadar Steinberg
  role: author
- name: Ronen Rapaport
  role: author

## Contact agent



## Publisher

organization: American Chemical Society (ACS)

## Managing organization



## Keyword

- subject: Spectroscopic ellipsometry
  schema: not_defined
- subject: thickness mapping
  schema: not_defined
- subject: transition metal dichalcogenides
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: ACS Nano
  issn: 1936086X
  volume: '17'
  issue: '10'
  start_page: 9188
  end_page: 9196

## Conference



## Related item



## Funding

- identifier: 861/19
  funder_name: Israel Science Foundation
- identifier: '2019737'
  funder_name: United States-Israel Binational Science Foundation
- identifier: 1087/22
  funder_name: Israel Science Foundation
- identifier: 836/17
  funder_name: Israel Science Foundation

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## Fileset

- id: 5be01b5c-93bc-499e-a345-7b8303646179
  filename: acsnano.2c12773.pdf
  content_type: application/pdf
  size: 4587897
  md5: 9842e3ca4e0db34204455f19d06dbcd3

## Thumbnail

fileset_id: 5be01b5c-93bc-499e-a345-7b8303646179
filename: acsnano.2c12773.pdf