@misc{ogiwara2019a,
  title = {Auger Depth Profiling Analysis of FeNi/CoFeB/FeNi Specimen Using an Ultra Low Angle Incidence Ion Beam },
  author = {Ogiwara, Toshiya, Yanagiuchi, Katsuaki, Yoshikawa, Hideki},
  publisher = {Surface Analysis Society of Japan},
  year = {2019-03-31},
  keywords = {Auger Depth Profiling Analysis, FeNi/CoFeB/FeNi Thin Film , Ultra Low Angle Incidence Ion Beam}
}