# Nanoscale Cathodoluminescence and Conductive Mode Scanning Electron Microscopy of van der Waals Heterostructures https://mdr.nims.go.jp/datasets/c5af70b0-f67c-45ac-9d74-880f48a43ab1 ## File - [acsnano.3c03261.pdf](https://mdr.nims.go.jp/filesets/e3d94cf0-0a52-47e2-8789-83693a5f42ee/download) ([Detail](https://mdr.nims.go.jp/filesets/e3d94cf0-0a52-47e2-8789-83693a5f42ee.md)) ## Id c5af70b0-f67c-45ac-9d74-880f48a43ab1 ## Local identifier ## Visibility open_to_public ## State published ## Created at 2025-02-13T07:22:18.863901Z ## Updated at 2025-02-14T03:31:01.544175Z ## Published at 2025-02-14T03:31:01.632648Z ## Doi ## First published url https://doi.org/10.1021/acsnano.3c03261 ## Date published 2023-06-27 ## Recorded date published 2023-6-27 ## Resource type journal_article ## Manuscript type vor ## Collection ## Title - title: Nanoscale Cathodoluminescence and Conductive Mode Scanning Electron Microscopy of van der Waals Heterostructures title_type: original lang: en ## Description - description: Van der Waals heterostructures (vdW-HS) allow the integration of dissimilar materials to form complex devices. These devices commonly rely on the careful manipulation of charges in and across multiple materials and interfaces. However, at present, submicron variations in strain, doping or electrical breakages may exist undetected within a device, adversely affecting macroscale performance. Here we propose the use of conductive mode and cathodoluminescence scanning electron microscopy (CM-SEM and SEM-CL respectively) to investigate these phenomena. As a model system, we study a sample of monolayer WSe2 encapsulated in hexagonal boron nitride (hBN). CM-SEM allows for quantification of the flow of electrons out of a sample during SEM measurements. Through this, we reveal during electron irradiation that, at 5 keV, up to 70% of beam electrons are deposited into the vdW-HS and can subsequently transfer into the WSe2. We then demonstrate this accumulation of charge leads to dynamic doping of WSe2, reducing its CL efficiency by up to 30% over 30 s. Finally, we show by providing a path for excess electrons to leave the sample, near full restoration of the initial CL signal can be achieved. These results indicate trapping of charges in vdW-HS during electron irradiation must be considered to obtain and maintain optimal performance of vdW-HS devices during processes such as e-beam lithography or SEM. We also demonstrate CM-SEM and SEM-CL form a toolkit through which nanoscale characterisation of vdW-HS devices can be performed, allowing electrical and optical properties to be correlated. description_type: abstract lang: und ## Creator - name: Hugh Ramsden role: author - name: Soumya Sarkar role: author - name: Yan Wang role: author - name: Yiru Zhu role: author - name: James Kerfoot role: author - name: Evgeny M. Alexeev role: author - name: Takashi Taniguchi role: author orcid: https://orcid.org/0000-0002-1467-3105 organization: National Institute for Materials Science ror: https://ror.org/026v1ze26 - name: Kenji Watanabe role: author orcid: https://orcid.org/0000-0003-3701-8119 organization: National Institute for Materials Science ror: https://ror.org/026v1ze26 - name: Sefaattin Tongay role: author - name: Andrea C. Ferrari role: author - name: Manish Chhowalla role: author ## Contact agent ## Publisher organization: American Chemical Society (ACS) ## Managing organization ## Keyword - subject: Van der Waals heterostructures schema: not_defined - subject: conductive mode schema: not_defined - subject: cathodoluminescence schema: not_defined ## Rights - identifier: https://creativecommons.org/licenses/by/4.0/ ## Other identifier(s) ## Data origin ## Embargo ## Journal - title: ACS Nano issn: 1936086X volume: '17' issue: '12' start_page: 11882 end_page: 11891 ## Conference ## Related item ## Funding - funder_name: GIPT - funder_name: CHARM EU - funder_name: FP7 Information and Communication Technologies - identifier: EP/K01711X/1 funder_name: Engineering and Physical Sciences Research Council - identifier: EP/K017144/1 funder_name: Engineering and Physical Sciences Research Council - identifier: EP/L016087/1 funder_name: Engineering and Physical Sciences Research Council - identifier: EP/N010345/1 funder_name: Engineering and Physical Sciences Research Council - identifier: EP/T001038/1 funder_name: Engineering and Physical Sciences Research Council - identifier: EP/T026200/1 funder_name: Engineering and Physical Sciences Research Council - identifier: EP/V000055/1 funder_name: Engineering and Physical Sciences Research Council - identifier: EP/X015742/1 funder_name: Engineering and Physical Sciences Research Council - identifier: WRM\FT\180009 funder_name: Royal Society - identifier: 20H00354 funder_name: Japan Society for the Promotion of Science - identifier: 23H02052 funder_name: Japan Society for the Promotion of Science - funder_name: 'FP7 Ideas: European Research Council' - funder_name: Graphene Flagship - identifier: '101019828' funder_name: H2020 European Research Council ## Instrument ## Instrument operator ## Instrument managing organization ## Measurement method ## Specimen ## Chemical composition ## Structure for specimen ## Structural feature for specimen ## Specific property for specimen ## Process for specimen treatment ## Computational method ## Energy level/transition state ## Software ## Custom property ## Fileset - id: e3d94cf0-0a52-47e2-8789-83693a5f42ee filename: acsnano.3c03261.pdf content_type: application/pdf size: 5295638 md5: cf6fe870425b47dd240f78d26b9fe90f ## Thumbnail fileset_id: e3d94cf0-0a52-47e2-8789-83693a5f42ee filename: acsnano.3c03261.pdf