@article{oshima,
  title = {Formation of near-vertical trenches and fins with flat {−201} sidewalls on (512) β-Ga
                    <sub>2</sub>
                    O
                    <sub>3</sub>
                    via TMAH wet etching},
  author = {Takayoshi Oshima},
  publisher = {Informa UK Limited},
  year = {2026},
  keywords = {Ga2O3}
}