# Determining electron inelastic mean free paths by iterative Monte Carlo analysis of the backscattered electron spectrum

https://mdr.nims.go.jp/datasets/c4668c13-ed1c-477d-b24a-984fa40ccde3

## File

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## Id

c4668c13-ed1c-477d-b24a-984fa40ccde3

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-12-22T01:38:01.742913Z

## Updated at

2025-12-22T02:15:22.301394Z

## Published at

2025-12-22T03:21:53.342739Z

## Doi



## First published url

https://doi.org/10.1063/5.0302645

## Date published

2025-11-21

## Recorded date published

2025-11-21

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Determining electron inelastic mean free paths by iterative Monte Carlo analysis
    of the backscattered electron spectrum
  title_type: original
  lang: en

## Description

- description: This study presents a novel method for extracting inelastic mean free
    paths (IMFPs) of electrons in solids from the backscattered electron spectrum
    (BES) using iterative Monte Carlo simulations. In our approach, the IMFP is parameterized
    using the Tanuma–Powell–Penn (TPP-2M) formula and a classical trajectory Monte
    Carlo simulation is used to model electron transport processes and generate a
    theoretical BES. Through an iterative process, we optimize the TPP parameters
    to achieve the best fit between the simulated and experimental spectra over a
    wide energy range. This method was applied to determine the IMFPs of 25 targets,
    such as C (graphite), Mg, Al (100), Al (111), Si, Ti, V, Cr, Fe, Co, Ni, Cu (100),
    Cu (110), Cu (111), Mo, Ru, Rh, Ag, Sn, W, Re, Ir, Pt, Au, and Bi, in the energy
    range from 200 to 4900 eV, using a comprehensive experimental BES data set. The
    results demonstrate that the IMFPs
  description_type: abstract
  lang: und

## Creator

- name: Jiamin Gong
  role: author
- name: Lihao Yang
  role: author
- name: Hideki Yoshikawa
  role: author
  orcid: https://orcid.org/0000-0002-7389-8865
  organization: National Institute for Materials Science
- name: Shigeo Tanuma
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941
  organization: National Institute for Materials Science
- name: Bo Da
  role: author
  orcid: https://orcid.org/0000-0002-0785-8662
  organization: National Institute for Materials Science
- name: Chuanhong Jin
  role: author
- name: Zejun Ding
  role: author

## Contact agent



## Publisher

organization: AIP Publishing

## Managing organization



## Keyword

- subject: electron inelastic mean free paths
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc-nd/4.0/
  date_licensed: 2025-11-17

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Journal of Applied Physics
  issn: '00218979'
  volume: '138'
  issue: '19'
  article_number: '195301'

## Conference



## Related item



## Funding

- identifier: JP21K14656
  funder_name: Japan Society for the Promotion of Science
- funder_name: Kurata Grants from the Hitachi Global Foundation and the Iketani Science
    & Technology Foundation
- identifier: 2022YFB4401602
  funder_name: National Key Research and Development Program of China
- identifier: B16042
  funder_name: 111 Project

## Instrument



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## Fileset

- id: faf5655a-1db2-4e99-a184-ceba023a99e8
  filename: shrine20251222-1807645-xxwqvj.pdf
  content_type: application/pdf
  size: 2722342
  md5: a015949a8369a9613a94e13ed5d6d24b

## Thumbnail

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filename: shrine20251222-1807645-xxwqvj.pdf