@misc{takayoshi2025a,
  title = {Step-and-terrace surface formation on (001) <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> by wet etching using 2.38 wt% tetramethylammonium hydroxide (TMAH) lithographic developer},
  author = {Takayoshi Oshima},
  publisher = {IOP Publishing},
  year = {2025-08-01},
  keywords = {Ga2O3, TMAH, Wet etching}
}