# Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products

https://mdr.nims.go.jp/datasets/c3fa257f-703e-43c8-9956-4f576b53c020

## File

- [Chen_2024_Appl._Phys._Express_17_021001.pdf](https://mdr.nims.go.jp/filesets/1a96768f-bf56-498c-be8c-6d1dcf0f81eb/download) ([Detail](https://mdr.nims.go.jp/filesets/1a96768f-bf56-498c-be8c-6d1dcf0f81eb.md))

## Id

c3fa257f-703e-43c8-9956-4f576b53c020

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-08-26T01:28:39.609818Z

## Updated at

2024-08-30T23:30:32.554351Z

## Published at

2024-08-30T23:30:32.673675Z

## Doi



## First published url

https://doi.org/10.35848/1882-0786/ad2027

## Date published

2024-02-01

## Recorded date published

2024-2-1

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Higher-order resonance of single-crystal diamond cantilever sensors toward
    high f‧Q products
  title_type: original
  lang: en

## Description

- description: MEMS resonant sensing devices require both HF (f) and low dissipation
    or high quality factor (Q) to ensure high sensitivity and high speed. In this
    study, we investigate the resonance properties and energy loss in the first three
    resonance modes, resulting in a significant increase in f‧Q product at higher
    orders. The third order resonance exhibits an approximately 15-fold increase in
    f‧Q product, while the Q factor remains nearly constant. Consequently, we achieved
    an ultrahigh f‧Q product exceeding 1012 Hz by higher-order resonances in single-crystal
    diamond cantilevers.
  description_type: abstract
  lang: und

## Creator

- name: Guo Chen
  role: author
- name: Zilong Zhang
  role: author
  orcid: https://orcid.org/0000-0002-9759-9253
  organization: National Institute for Materials Science
- name: Keyun Gu
  role: author
- name: Liwen Sang
  role: author
  orcid: https://orcid.org/0000-0003-0946-1025
  organization: National Institute for Materials Science
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
- name: Masaya Toda
  role: author
- name: Haitao Ye
  role: author
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
  organization: National Institute for Materials Science
- name: Zhaohui Huang
  role: author
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science

## Contact agent



## Publisher

organization: IOP Publishing

## Managing organization



## Keyword

- subject: Diamond, MEMS
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Applied Physics Express
  issn: '18820786'
  volume: '17'
  issue: '2'
  article_number: '021001'

## Conference



## Related item



## Funding

- identifier: 20H02212
  funder_name: Japan Society for the Promotion of Science

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 1a96768f-bf56-498c-be8c-6d1dcf0f81eb
  filename: Chen_2024_Appl._Phys._Express_17_021001.pdf
  content_type: application/pdf
  size: 1247228
  md5: 12a569c3a7b17b67ca64caca073b5d02

## Thumbnail

fileset_id: 1a96768f-bf56-498c-be8c-6d1dcf0f81eb
filename: Chen_2024_Appl._Phys._Express_17_021001.pdf