# A perspective on diamond MEMS magnetic sensors

https://mdr.nims.go.jp/datasets/c1e8d5b7-2ae0-4bb6-9d3b-0ca9d939481f

## File

- [perspective-20241226.pdf](https://mdr.nims.go.jp/filesets/16803d39-2726-46b6-a71c-82d89908ab02/download) ([Detail](https://mdr.nims.go.jp/filesets/16803d39-2726-46b6-a71c-82d89908ab02.md))

## Id

c1e8d5b7-2ae0-4bb6-9d3b-0ca9d939481f

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-05-19T02:32:58.436234Z

## Updated at

2025-05-19T07:30:19.372992Z

## Published at

2025-05-19T07:22:33.804330Z

## Doi

https://doi.org/10.48505/nims.5484

## First published url

https://doi.org/10.1063/5.0255014

## Date published

2025-03-01

## Recorded date published

2025-3-1

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: A perspective on diamond MEMS magnetic sensors
  title_type: original
  lang: en

## Description

- description: Microelectromechanical system (MEMS) technology has unlocked a wide
    range of applications in electronics, mobility-type devices, and medical and energy
    generation devices from sensors and actuators to switches. Diamond, in particular,
    stands out for its exceptional mechanical robustness and electronic performance
    in extreme conditions, offering sensitivity and reliability superior to other
    semiconductor materials for MEMS sensors. In this perspective, we review the principles
    of MEMS magnetic sensors, diamond for MEMS, thermal stability of diamond MEMS
    resonators, and diamond MEMS magnetic sensors, particularly for the applications
    under high temperatures. We present the interface engineering of diamond MEMS
    magnetic sensors to improve the thermal stability. Finally, we discuss the potential
    solutions, outline future research directions, and discuss the prospects for continued
    progress of diamond MEMS.
  description_type: abstract
  lang: und

## Creator

- name: Zilong Zhang
  role: author
  orcid: https://orcid.org/0000-0002-9759-9253
- name: Keyun Gu
  role: author
- name: Masaya Toda
  role: author
  orcid: https://orcid.org/0000-0003-3849-6948
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266

## Contact agent



## Publisher

organization: AIP Publishing

## Managing organization



## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined
- subject: magnetic sensors
  schema: not_defined

## Rights

- description: 'This article may be downloaded for personal use only. Any other use
    requires prior permission of the author and AIP Publishing. This article appeared
    in Zilong Zhang, Keyun Gu, Masaya Toda, Meiyong Liao; A perspective on diamond
    MEMS magnetic sensors. Appl. Phys. Lett. 10 March 2025; 126 (10): 100501 and may
    be found at https://doi.org/10.1063/5.0255014.'
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Applied Physics Letters
  issn: '00036951'
  volume: '126'
  issue: '10'

## Conference



## Related item



## Funding

- identifier: 24H00287
  funder_name: Japan Society for the Promotion of Science
- identifier: 22K18957
  funder_name: Japan Society for the Promotion of Science
- identifier: and 24K00828
  funder_name: Japan Society for the Promotion of Science

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## Fileset

- id: 16803d39-2726-46b6-a71c-82d89908ab02
  filename: perspective-20241226.pdf
  content_type: application/pdf
  size: 2043757
  md5: 168987935db2769ee11d4671c8c73b94

## Thumbnail

fileset_id: 16803d39-2726-46b6-a71c-82d89908ab02
filename: perspective-20241226.pdf