# Spatial Control of Optical Emission and Conductivity in Molybdenum Oxide through Electron-Beam Irradiation

https://mdr.nims.go.jp/datasets/bfb79726-7ddc-4dd5-9f5a-92d09cdf9347

## File

- [2025A01295G_nl-2025-03617w_revised Supporting Information.docx](https://mdr.nims.go.jp/filesets/ea493ca5-58bc-4c89-adb1-e8179179e156/download) ([Detail](https://mdr.nims.go.jp/filesets/ea493ca5-58bc-4c89-adb1-e8179179e156.md))
- [2025A01295G_nl-2025-03617w_revised manuscript.docx](https://mdr.nims.go.jp/filesets/b6eac7f0-b134-4fad-b079-fcb67b6b778c/download) ([Detail](https://mdr.nims.go.jp/filesets/b6eac7f0-b134-4fad-b079-fcb67b6b778c.md))

## Id

bfb79726-7ddc-4dd5-9f5a-92d09cdf9347

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-06-25T07:31:30.093388Z

## Updated at

2026-06-26T05:27:37.336281Z

## Published at

2026-08-31T23:25:55.338406Z

## Doi



## First published url

https://doi.org/10.1021/acs.nanolett.5c03617

## Date published

2025-09-10

## Recorded date published

2025-9-10

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Spatial Control of Optical Emission and Conductivity in Molybdenum Oxide
    through Electron-Beam Irradiation
  title_type: original
  lang: en

## Description

- description: Deterministic spatial control of material properties is essential for
    advanced electronic and optoelectronic device technologies. van der Waals (vdW)
    materials stand out for their high tunability, yet achieving multifunctional on-chip
    control remains challenging. Here, we focus on α-MoO3 and site-selectively modulate
    both its optical emission and conductivity via electron-beam irradiation. In situ
    cathodoluminescence spectroscopy reveals a cumulative enhancement of blue emission
    under the beam, exhibiting superlinear increases in intensity with beam current.
    Irradiated regions show distinct contrasts in Raman and work functions, indicating
    oxygen defect formation. Moreover, these local structural modifications substantially
    increase lateral and vertical conductivities, enabling conductive channels with
    sharp boundaries. Building on this, we demonstrate stable, deterministic optical
    patterning with subdiffraction spatial resolution, highlighting the potential
    for submicron devices without chemical processes or traditional lithography. Our
    results provide a versatile platform for on-chip light sources, conductive interconnects,
    and customizable optoelectronic elements, expanding the design space of vdW materials.
  description_type: abstract
  lang: en

## Creator

- name: Yifeng Liu
  role: author
- name: Shisong Luo
  role: author
- name: Wenjing Wu
  role: author
- name: Fumikazu Murakami
  role: author
- name: Tian Lang
  role: author
- name: Aryan Chugh
  role: author
- name: Chen-yang Lin
  role: author
- name: Kenji Watanabe
  role: author
  orcid: https://orcid.org/0000-0003-3701-8119
  organization: National Institute for Materials Science
- name: Takashi Taniguchi
  role: author
  orcid: https://orcid.org/0000-0002-1467-3105
  organization: National Institute for Materials Science
- name: Shengxi Huang
  role: author
- name: Yuji Zhao
  role: author
- name: Jun Lou
  role: author
- name: Hae Yeon Lee
  role: author

## Contact agent



## Publisher

organization: American Chemical Society (ACS)

## Managing organization



## Keyword

- subject: α-MoO3
  schema: not_defined
- subject: Electron-beam irradiation
  schema: not_defined
- subject: Cathodoluminescence
  schema: not_defined

## Rights

- description: This document is the Accepted Manuscript version of a Published Article
    that appeared in final form in Nano Letters, copyright © 2025 American Chemical
    Society. To access the final published article see https://doi.org/10.1021/acs.nanolett.5c03617.
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2025-09-01
end_date: 2026-09-01

## Journal

- title: Nano Letters
  issn: '15306984'
  volume: '25'
  issue: '36'
  start_page: 13664
  end_page: 13671

## Conference



## Related item



## Funding

- identifier: ECCS-1943895
  funder_name: Division of Electrical, Communications and Cyber Systems
- identifier: ECCS-2246564
  funder_name: Division of Electrical, Communications and Cyber Systems
- funder_name: Rice University
- identifier: C-2144
  funder_name: Welch Foundation
- identifier: RS-2024-00451173
  funder_name: National Research Foundation of Korea
- identifier: JPMJCR24A5
  funder_name: Core Research for Evolutional Science and Technology
- identifier: EEC-2113882
  funder_name: Division of Engineering Education and Centers
- identifier: 21H05233
  funder_name: Japan Society for the Promotion of Science
- identifier: 23H02052
  funder_name: Japan Society for the Promotion of Science

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



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## Thumbnail

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filename: 2025A01295G_nl-2025-03617w_revised Supporting Information.docx