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説明:

Deterministic spatial control of material properties is essential for advanced electronic and optoelectronic device technologies. van der Waals (vdW) materials stand out for their high tunability, yet achieving multifunctional on-chip control remains challenging. Here, we focus on α-MoO3 and site-selectively modulate both its optical emission and conductivity via electron-beam irradiation. In situ cathodoluminescence spectroscopy reveals a cumulative enhancement of blue emission under the beam, exhibiting superlinear increases in intensity with beam current. Irradiated regions show distinct contrasts in Raman and work functions, indicating oxygen defect formation. Moreover, these local structural modifications substantially increase lateral and vertical conductivities, enabling conductive channels with sharp boundaries. Building on this, we demonstrate stable, deterministic optical patterning with subdiffraction spatial resolution, highlighting the potential for submicron devices without chemical processes or traditional lithography. Our results provide a versatile platform for on-chip light sources, conductive interconnects, and customizable optoelectronic elements, expanding the design space of vdW materials.

権利情報:

• In Copyright
  

  This document is the Accepted Manuscript version of a Published Article that appeared in final form in Nano Letters, copyright © 2025 American Chemical Society. To access the final published article see https://doi.org/10.1021/acs.nanolett.5c03617.

キーワード: α-MoO3, Electron-beam irradiation, Cathodoluminescence

刊行年月日: 2025-09-10

出版者: American Chemical Society (ACS)

掲載誌:

• Nano Letters (ISSN: 15306984) vol. 25 issue. 36 p. 13664-13671

研究助成金:

• Division of Electrical, Communications and Cyber Systems ECCS-1943895
• Division of Electrical, Communications and Cyber Systems ECCS-2246564
• Rice University
• Welch Foundation C-2144
• National Research Foundation of Korea RS-2024-00451173
• Core Research for Evolutional Science and Technology JPMJCR24A5
• Division of Engineering Education and Centers EEC-2113882
• Japan Society for the Promotion of Science 21H05233
• Japan Society for the Promotion of Science 23H02052

原稿種別: 著者最終稿 (Accepted manuscript)

MDR DOI:

公開URL: https://doi.org/10.1021/acs.nanolett.5c03617

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更新時刻: 2026-06-26 14:27:37 +0900

MDRでの公開時刻: 2026-09-01 08:25:55 +0900