# Evaluation of stress in (111) homoepitaxial CVD diamond films by Raman spectrum and nitrogen-vacancy centers

https://mdr.nims.go.jp/datasets/bd6db1cf-0250-4911-9376-2bbd89ecd19a

## File

- [Evaluation of stress in (111) homoepitaxial CVD diamond films by Raman spectrum and nitrogen-vacancy centers.pdf](https://mdr.nims.go.jp/filesets/6ce1e386-e23c-46b7-9095-b78c119acc84/download) ([Detail](https://mdr.nims.go.jp/filesets/6ce1e386-e23c-46b7-9095-b78c119acc84.md))

## Id

bd6db1cf-0250-4911-9376-2bbd89ecd19a

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-07-10T02:03:02.752232Z

## Updated at

2025-07-10T23:30:53.961500Z

## Published at

2025-07-10T23:16:47.350488Z

## Doi



## First published url

https://doi.org/10.35848/1882-0786/ad88d4

## Date published

2024-11-01

## Recorded date published

2024-11-1

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Evaluation of stress in (111) homoepitaxial CVD diamond films by Raman spectrum
    and nitrogen-vacancy centers
  title_type: original
  lang: en

## Description

- description: Reduction of inhomogeneous stress in diamond is crucially important
    for extracting excellent performance of semiconducting diamond. In this study,
    to investigate elastic deformation in nitrogen doped (111) diamond films caused
    by stress, we evaluated the stress in these films using confocal Raman microscopy.
    The stress was detectable when the misorientation angle (θ_mis) was below 3.7°
    and it decreased as θ_mis increased. The Raman spectroscopic measurements, considered
    together with reported stress measurements by nitrogen-vacancy centers, suggest
    that the diamond film at low θ_mis was subjected to compressive stresses that
    were stronger in the [111] direction than [11 ̅0] or [1 ̅1 ̅2] directions.
  description_type: abstract
  lang: und

## Creator

- name: T. Tsuji
  role: author
  orcid: https://orcid.org/0000-0002-7342-6198
- name: C. Shinei
  role: author
  orcid: https://orcid.org/0000-0003-4926-8641
- name: T. Iwasaki
  role: author
- name: M. Hatano
  role: author
- name: T. Teraji
  role: author
  orcid: https://orcid.org/0000-0002-7731-0547

## Contact agent



## Publisher

organization: IOP Publishing

## Managing organization



## Keyword

- subject: diamond
  schema: not_defined
- subject: stress
  schema: not_defined
- subject: nitrogen vacancy center
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin



## Embargo



## Journal

- title: Applied Physics Express
  issn: '18820778'
  volume: '17'
  issue: '11'
  start_page: 115502

## Conference



## Related item



## Funding

- identifier: R&D for construction of a global quantum cryptogr
  funder_name: Ministry of Internal Affairs and Communications
- identifier: KAKENHI/20H05661
  funder_name: Japan Society for the Promotion of Science
- identifier: Q-LEAP/JPMXS0118067395
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: SIP “Promoting the application of advanced quant
  funder_name: Council for Science, Technology and Innovation
- identifier: Moonshot R&D (JPMJMS2062)
  funder_name: Japan Science and Technology Corporation

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 6ce1e386-e23c-46b7-9095-b78c119acc84
  filename: Evaluation of stress in (111) homoepitaxial CVD diamond films by Raman
    spectrum and nitrogen-vacancy centers.pdf
  content_type: application/pdf
  size: 1274160
  md5: 131f3c163ab7b58b53b27ef7e3be3967

## Thumbnail

fileset_id: 6ce1e386-e23c-46b7-9095-b78c119acc84
filename: Evaluation of stress in (111) homoepitaxial CVD diamond films by Raman spectrum
  and nitrogen-vacancy centers.pdf