@misc{yuki2026a,
  title = {Phase-selective sputter epitaxy of                    <i>δ</i>                    -NbN,                    <i>γ</i>                    -Nb4N3, and                    <i>β</i>                    -Nb2N on atomically flat AlN},
  author = {Yuki Kato, Koryo Masuzawa, Takayuki Harada, Hideto Miyake, Atsushi Kobayashi},
  publisher = {National Institute for Materials Science},
  year = {2026-05-14},
  keywords = {Thin films, Superconductivity, Nitrides}
}