# Surface desorption properties of hydrogen-terminated diamond detected by micromechanical resonator

https://mdr.nims.go.jp/datasets/ba733b6a-5387-43eb-8f9b-7e4b68dd5439

## File

- [2025 03 15 APL mauscript of H-1 desorption.docx](https://mdr.nims.go.jp/filesets/b339cb3e-467f-4eff-aa9e-cbac89957657/download) ([Detail](https://mdr.nims.go.jp/filesets/b339cb3e-467f-4eff-aa9e-cbac89957657.md))

## Id

ba733b6a-5387-43eb-8f9b-7e4b68dd5439

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-06-05T01:56:26.874558Z

## Updated at

2025-07-14T03:30:29.380680Z

## Published at

2025-07-14T03:17:15.466569Z

## Doi

https://doi.org/10.48505/nims.5586

## First published url

https://doi.org/10.1063/5.0274650

## Date published

2025-06-02

## Recorded date published

2025-6-2

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Surface desorption properties of hydrogen-terminated diamond detected by
    micromechanical resonator
  title_type: original
  lang: en

## Description

- description: Diamond, with its ultra-wide bandgap energy, has emerged as an extreme
    semiconductor due to its extraordinary electronic and thermal properties. The
    hydrogen-terminated diamond surface has attracted extensive attention due to its
    unique p-type surface conductivity. However, the fundamental nature of this p-type
    conductivity remains incompletely understood using existing surface analysis techniques.
    In this study, we investigate the dynamic thermal desorption of surface adsorbates
    on hydrogen-terminated diamond using single-crystal diamond microelectromechanical
    system (MEMS) resonators, avoiding charging-related issues. By analyzing variations
    in resonance performance and surface conductivity, we uncover several key findings:(i)
    The desorption of surface adsorbates reaches saturation at approximately 873 K.(ii)
    The desorbed mass per unit area is around 2.3 fg/μm², corresponding to an equivalent
    thickness of approximately 1 nm.(iii) The surface conductivity of hydrogen-terminated
    diamond can be fully restored even after annealing at 873 K, indicating the thermal
    stability of C-H bonds.This work offers an alternative insight into the surface
    properties of hydrogen-terminated diamond, accelerating the development of highly
    reliable diamond-based electronic devices.
  description_type: abstract
  lang: und

## Creator

- name: Keyun Gu
  role: author
  orcid: https://orcid.org/0000-0002-7505-7744
- name: Zilong Zhang
  role: author
  orcid: https://orcid.org/0000-0002-9759-9253
- name: Jian Huang
  role: author
  orcid: https://orcid.org/0000-0002-1268-8899
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266

## Contact agent



## Publisher

organization: AIP Publishing

## Managing organization



## Keyword

- subject: Diamond
  schema: not_defined
- subject: surface conductivity
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- description: 'This article may be downloaded for personal use only. Any other use
    requires prior permission of the author and AIP Publishing. This article appeared
    in Keyun Gu, Zilong Zhang, Jian Huang, Yasuo Koide, Satoshi Koizumi, Meiyong Liao;
    Surface desorption properties of hydrogen-terminated diamond detected by micromechanical
    resonator. Appl. Phys. Lett. 2 June 2025; 126 (22): 221901 and may be found at
    https://doi.org/10.1063/5.0274650.'
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin



## Embargo



## Journal

- title: Applied Physics Letters
  issn: '00036951'
  volume: '126'
  issue: '22'

## Conference



## Related item



## Funding

- identifier: 24H00287
  funder_name: Japan Society for the Promotion of Science

## Instrument



## Instrument operator



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## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



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## Process for specimen treatment



## Computational method



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## Fileset

- id: b339cb3e-467f-4eff-aa9e-cbac89957657
  filename: 2025 03 15 APL mauscript of H-1 desorption.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 1840524
  md5: 7f8d860aa6bbf5b1fb9c4aa4524368f0

## Thumbnail

fileset_id: b339cb3e-467f-4eff-aa9e-cbac89957657
filename: 2025 03 15 APL mauscript of H-1 desorption.docx