# High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry

https://mdr.nims.go.jp/datasets/ba1dd8b0-d1c1-4462-9183-fdd875f01325

## File

- [3-Abstract-WEN Liao.docx](https://mdr.nims.go.jp/filesets/65bb35ae-5faa-4055-ab58-09cb78072e40/download) ([Detail](https://mdr.nims.go.jp/filesets/65bb35ae-5faa-4055-ab58-09cb78072e40.md))

## Id

ba1dd8b0-d1c1-4462-9183-fdd875f01325

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-10-20T04:53:46.336171Z

## Updated at

2026-01-09T02:00:08.397581Z

## Published at

2026-01-09T03:22:33.495167Z

## Doi

https://doi.org/10.48505/nims.6116

## First published url



## Date published



## Recorded date published



## Resource type

conference_presentation

## Manuscript type

na

## Collection



## Title

- title: High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry
  title_type: original
  lang: en

## Description

- description: Next-generation thermometric technologies demand exceptional temperature
    precision combined with microscale to nanoscale spatial resolution, enabling advanced
    sensing applications in bio-calorimetry, optoelectronic sensing, quantum science,
    energy storage systems, and thermal management of electronic devices. Existing
    thermometric techniques based on thermocouples, resistive elements, or optical
    systems are usually hindered by inherent drawbacks, including bulky configurations,
    low resolution, high noise susceptibility, and narrow temperature operation ranges.
    In comparison, thermometry based on microelectromechanical systems (MEMS) offers
    compelling advantages, such as miniaturization, scalable batch fabrication, and
    facile integration with electronic circuitry, positioning it as a promising solution
    for high-performance on-chip thermal sensing. However, mainstream silicon MEMS
    thermometry often suffers from the trade-off between sensitivity, temperature
    resolution, and thermal noise, resulting in insufficient sensing precision for
    high-resolution thermal measurements. To overcome these limitations, in this work,
    we propose the utilization of high-quality factor single-crystal diamond MEMS
    cantilevers with multi-mode resonance to address these challenges. The proposed
    diamond MEMS thermometry achieves unparalleled performance, with an ultra-high
    temperature resolution of 100 µK, an ultra-high sensitivity of ~22 nK/Hz1/2, and
    a wide operational temperature range from 6.5K to 380K. These achievements establish
    diamond MEMS resonators as a versatile and transformative platform for next-generation
    precision thermal sensing technologies.
  description_type: abstract
  lang: eng

## Creator

- name: Wen Zhao
  role: author
  orcid: https://orcid.org/0000-0001-8159-8195
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Guo Chen
  role: author
  orcid: https://orcid.org/0009-0004-9263-5616
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Zhaozong Zhang
  role: author
  orcid: https://orcid.org/0009-0003-8745-4469
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Satoshi KOIZUMI
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

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## Keyword

- subject: Diamond,
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

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## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: 36th International Conference on Diamond and Carbon Materials
start_date: 2025-08-31
end_date: 2025-09-04
identifier: https://www.elsevier.com/ja-jp/events/conferences/all/international-conference-on-diamond-and-carbon-materials

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## Fileset

- id: 65bb35ae-5faa-4055-ab58-09cb78072e40
  filename: 3-Abstract-WEN Liao.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 16536
  md5: 675e95b71a71e200cbbcc7c59bb4b138

## Thumbnail

fileset_id: 65bb35ae-5faa-4055-ab58-09cb78072e40
filename: 3-Abstract-WEN Liao.docx