# Simulation-Based Investigation of Curtain Gas Effect on Metal-Organic Chemical Vapor Deposition Growth of Two-Dimensional Transition Metal Dichalcogenides

https://mdr.nims.go.jp/datasets/b84f72f3-0e7c-4165-afc4-316060932e40

## File

- [CrystalGrowthDesign_final.pdf](https://mdr.nims.go.jp/filesets/de30f1d6-cc4f-4df0-9da4-f5e6beaa685d/download) ([Detail](https://mdr.nims.go.jp/filesets/de30f1d6-cc4f-4df0-9da4-f5e6beaa685d.md))

## Id

b84f72f3-0e7c-4165-afc4-316060932e40

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-09-24T01:27:02.627075Z

## Updated at

2025-07-07T23:30:18.063660Z

## Published at

2025-07-07T23:16:56.251424Z

## Doi

https://doi.org/10.48505/nims.4769

## First published url

https://doi.org/10.1021/acs.cgd.4c00477

## Date published

2024-07-17

## Recorded date published

2024-7-17

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Simulation-Based Investigation of Curtain Gas Effect on Metal-Organic Chemical
    Vapor Deposition Growth of Two-Dimensional Transition Metal Dichalcogenides
  title_type: original
  lang: en

## Description

- description: This study examines the impact of curtain gas flow on metal-organic
    chemical vapor deposition (MOCVD) growth of two-dimensional (2D) transition metal
    dichalcogenides using finite element method simulations and growth experiments.
    The simulation results demonstrate that the curtain gas changes precursor transfer
    dynamics, concentrates the flow toward the substrate, and potentially lowers contamination
    from chamber walls. The simulation findings are supported by experimental validation
    using tungsten and sulfur sources, which confirms that curtain gas flow is critical
    in enhancing the reproducibility of 2D WS2 growth. The research highlights the
    need to optimize gas flow dynamics in MOCVD processes to unlock the full potential
    of 2D materials in future electronic devices.
  description_type: abstract
  lang: eng

## Creator

- name: Feng Zhang
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials
    Field/2D Quantum Materials Group
  ror: https://ror.org/026v1ze26
- name: Fanyu Zeng
  role: author
  orcid: https://orcid.org/0009-0005-1145-2939
  organization: National Institute for Materials Science
  department: Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials
    Field/2D Quantum Materials Group
  ror: https://ror.org/026v1ze26
- name: Daichi Kozawa
  role: author
  orcid: https://orcid.org/0000-0002-0629-5589
  organization: National Institute for Materials Science
  department: Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials
    Field/2D Quantum Materials Group
  ror: https://ror.org/026v1ze26
- name: Ryo Kitaura
  role: author
  orcid: https://orcid.org/0000-0001-8108-109X
  organization: National Institute for Materials Science
  department: Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials
    Field/2D Quantum Materials Group
  ror: https://ror.org/026v1ze26

## Contact agent



## Publisher

organization: American Chemical Society

## Managing organization



## Keyword

- subject: 2D materials
  schema: not_defined
- subject: Finite Element Method
  schema: not_defined
- subject: Chemical Vapor Deposition
  schema: not_defined

## Rights

- description: This document is the Accepted Manuscript version of a Published Work
    that appeared in final form in Crystal Growth & Design, copyright © 2024 American
    Chemical Society after peer review and technical editing by the publisher. To
    access the final edited and published work see https://doi.org/10.1021/acs.cgd.4c00477
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2024-07-08
end_date: 2025-07-08

## Journal

- title: CRYSTAL GROWTH & DESIGN
  issn: '15287483'
  volume: '24'
  issue: '14'
  start_page: 6001
  end_page: 6006

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## Specimen



## Chemical composition



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## Fileset

- id: de30f1d6-cc4f-4df0-9da4-f5e6beaa685d
  filename: CrystalGrowthDesign_final.pdf
  content_type: application/pdf
  size: 738196
  md5: b416fc1b059402957ef0d1ace8398fbd

## Thumbnail

fileset_id: de30f1d6-cc4f-4df0-9da4-f5e6beaa685d
filename: CrystalGrowthDesign_final.pdf