@misc{yuhao2024a, title = {Approach to Low Contact Resistance Formation on Buried Interface in Oxide Thin-Film Transistors: Utilization of Palladium-Mediated Hydrogen Pathway}, author = {Yuhao Shi, Masatake Tsuji, Hanjun Cho, Shigenori Ueda, Junghwan Kim, Hideo Hosono}, publisher = {American Chemical Society (ACS)}, year = {2024-04-02}, keywords = {oxide semiconductors, IGZO, thin-film transistors, contact resistance, palladium, hydrogen} }