@misc{takayoshi2025a,
  title = {Fabrication of air bridges on (100)
                          β-Ga2O3 using crystallographic HCl gas
                      etching},
  author = {Takayoshi Oshima, Yuichi Oshima},
  publisher = {AIP Publishing},
  year = {2025-05-01},
  keywords = {Ga2O3, HCl gas etching, air bridge}
}