@misc{tomoyuki2025a,
  title = {Analyses of oxygen precipitates in CZ-Si by X-ray diffuse scattering using parallel X-ray beam},
  author = {Tomoyuki Horikawa, Yoshiyuki Tsusaka, Junji Matsui, Tetsuya Tohei, Yusuke Hayashi, Akira Sakai},
  publisher = {IOP Publishing},
  year = {2025-04-01},
  keywords = {Silicon, X-ray diffuse scattering}
}