@misc{ogiwara1995a,
  title = {InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告（I）},
  author = {Ogiwara, Toshiya, Tanuma, Shigeo},
  publisher = {Surface Analysis Society of Japan},
  year = {1995-11-16},
  keywords = {Auger Depth Profiling Analysis, InP/GaInAs Specimen, Round Robin Test}
}