# A novel approach to micro-fabricated thermoelectric generators with SrTiO3

https://mdr.nims.go.jp/datasets/b0c3b140-3c57-4a13-aeac-fc9419664796

## File

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- [Suppl_Info_v7.6.pdf](https://mdr.nims.go.jp/filesets/695b3783-00d4-4ba2-8d5b-8c5d35e61b09/download) ([Detail](https://mdr.nims.go.jp/filesets/695b3783-00d4-4ba2-8d5b-8c5d35e61b09.md))

## Id

b0c3b140-3c57-4a13-aeac-fc9419664796

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-05-21T02:00:46.625222Z

## Updated at

2026-05-21T02:58:16.038166Z

## Published at

2026-05-21T05:27:34.988497Z

## Doi

https://doi.org/10.48505/nims.6308

## First published url

https://doi.org/10.1080/14686996.2026.2665920

## Date published

2026-05-08

## Recorded date published



## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: A novel approach to micro-fabricated thermoelectric generators with SrTiO3
  title_type: original
  lang: en

## Description

- description: The growing demand for autonomous, sustainable, and delocalized power
    sources for low-power-consuming electronic devices is driving a significant research
    effort on energy harvesting technologies. Among these, micro-thermoelectric generators
    (µTEGs) emerge as an appealing solution because of the abundance of residual latent
    heat sources. This paper proposes an approach to combine high-performance thermoelectric
    oxides with Si-based µTEGs, leveraging the miniaturization and high-density integration
    of CMOS-like technologies. The approach is applied to the integration of niobium
    doped strontium titanate (Nb:STO) thin films on Si-based planar µTEG structures.
    The Nb:STO-based µTEG achieves a specific power density Γ = 0.36 nW·cm−2 ·K−2
    under controlled temperature gradients, which is below state-of-the-art performance
    probably due to lower electrical conductivity from polycrystalline growth. When
    the chips were tested under realistic operating conditions – placed on a hot surface
    at 175 °C – a maximum power output of p = 0.07 nW was obtained. Nonetheless, by
    implementing a technological solution for thermal dissipation, the temperature
    gradient across the thermoelectric material improved by a factor of 110, resulting
    in a significantly higher extracted power of p = 7.75 nW.
  description_type: abstract
  lang: en

## Creator

- name: Joaquin Santandera
  role: author
  organization: a Institute of Microelectronics of Barcelona (IMB-CNM-CSIC)
- name: Iñigo Martin-Fernandez
  role: author
- name: Carlos Carbonell
  role: author
- name: Alex Rodríguez-Iglesias
  role: author
- name: Laura Fuentes-Rodríguez
  role: author
- name: Marta Fernández-Regúlez
  role: author
- name: Llibertat Abad
  role: author
- name: Aitor F. Lopeandia
  role: author
- name: Arindom Chatterjee
  role: author
- name: Nini Pryds
  role: author
- name: Luis Fonseca
  role: author
- name: Marc Salleras
  role: author

## Contact agent



## Publisher

organization: Taylor & Francis

## Managing organization



## Keyword

- subject: Thermoelectric
  schema: not_defined
- subject: micro-thermoelectric generator
  schema: not_defined
- subject: thin-films
  schema: not_defined
- subject: SrTiO₃
  schema: not_defined
- subject: IoT
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Science and Technology of Advanced Materials
  issn: '14686996'
  volume: '27'
  article_number: '2665920'

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: be016182-775b-4f7e-bad5-3333ecbefaf9
  filename: A novel approach to micro-fabricated thermoelectric generators with SrTiO3.pdf
  content_type: application/pdf
  size: 4005587
  md5: 619a21e1b7c0c69d70cb4ede6f3f4f96
- id: ca98a0e2-baca-4fe0-8a6b-7f7996c4aba0
  filename: STAM-2025-0523_data.zip
  content_type: application/zip
  size: 97553
  md5: ac0f857cfd49eb06a15d65ea8e9bbdc7
- id: 695b3783-00d4-4ba2-8d5b-8c5d35e61b09
  filename: Suppl_Info_v7.6.pdf
  content_type: application/pdf
  size: 1033591
  md5: 5e98a72ee328bd040654ae877f0ea7f2

## Thumbnail

fileset_id: be016182-775b-4f7e-bad5-3333ecbefaf9
filename: A novel approach to micro-fabricated thermoelectric generators with SrTiO3.pdf