# NF3 and F2 gas fluorination of GaN surface and Pt/GaN interface analyzed by hard X-ray photoelectron spectroscopy

https://mdr.nims.go.jp/datasets/b08358ac-c125-425b-a809-7bf000a04d45

## File

- [2023A01879A.pdf](https://mdr.nims.go.jp/filesets/9396df5f-0730-44be-9fe0-857bb5ca737d/download) ([Detail](https://mdr.nims.go.jp/filesets/9396df5f-0730-44be-9fe0-857bb5ca737d.md))

## Id

b08358ac-c125-425b-a809-7bf000a04d45

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-03-26T04:10:15.584494Z

## Updated at

2026-03-19T05:27:24.114374Z

## Published at

2026-03-19T04:36:28.752772Z

## Doi

https://doi.org/10.48505/nims.4450

## First published url

https://doi.org/10.1016/j.apsusc.2024.159941

## Date published

2024-03-19

## Recorded date published

2024-6

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: NF3 and F2 gas fluorination of GaN surface and Pt/GaN interface analyzed
    by hard X-ray photoelectron spectroscopy
  title_type: original
  lang: en

## Description

- description: The effects of NF3 or F2 gas annealing on epitaxially grown GaN and
    its interface with sputter-deposited Pt were investigated using hard X-ray photoelectron
    spectroscopy.Annealing GaN and Pt/GaN samples in an NF3 atmosphere led to the
    emergence of prominent F 1s peaks and chemically shifted Ga 2p peaks, indicating
    the efficient formation of Ga–Fx species not only in the bare GaN surface but
    also in the Pt/GaN interface, even when the NF3 treatment was performed after
    the Pt was deposited.By contrast, F2 annealing also led to the fluorination of
    the GaN surface and nonfluorination of the Pt/GaN interface. Although the plasma
    sputtering process removed F from the surface, band shifts were observed when
    the treatment conditions were varied. The findings in this study suggest that
    NF3 treatment is an effective postprocessing method for fluorinating GaN-based
    systems before or after metaldeposition.
  description_type: abstract
  lang: und

## Creator

- name: Asahiko Matsuda
  role: author
  orcid: https://orcid.org/0000-0001-5989-027X
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Takashi Teramoto
  role: author
  orcid: https://orcid.org/0000-0002-9368-1284
- name: Takahiro Nagata
  role: author
  orcid: https://orcid.org/0000-0002-8591-2943
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Dominic Gerlach
  role: author
  orcid: https://orcid.org/0000-0003-1859-0750
- name: Peng Shen
  role: author
  orcid: https://orcid.org/0000-0002-1971-5490
- name: Shigenori Ueda
  role: author
  orcid: https://orcid.org/0000-0001-9425-0614
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Takako Kimura
  role: author
- name: Christian Dussarrat
  role: author
- name: Toyohiro Chikyow
  role: author
  orcid: https://orcid.org/0000-0003-3860-4806

## Contact agent



## Publisher

organization: Elsevier BV

## Managing organization



## Keyword

- subject: Fluorination
  schema: not_defined
- subject: Surface passivation
  schema: not_defined
- subject: hard X-ray photoelectron spectroscopy
  schema: not_defined
- subject: Gallium nitride
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc-nd/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2024-03-19
end_date: 2026-03-20

## Journal

- title: Applied Surface Science
  issn: '01694332'
  volume: '659'
  article_number: '159941'

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 9396df5f-0730-44be-9fe0-857bb5ca737d
  filename: 2023A01879A.pdf
  content_type: application/pdf
  size: 1980848
  md5: 95ca4069a43cbdebeea3c6dfdb25bd52

## Thumbnail

fileset_id: 9396df5f-0730-44be-9fe0-857bb5ca737d
filename: 2023A01879A.pdf