@misc{asahiko2024a,
  title = {NF3 and F2 gas fluorination of GaN surface and Pt/GaN interface analyzed by hard X-ray photoelectron spectroscopy},
  author = {Asahiko Matsuda, Takashi Teramoto, Takahiro Nagata, Dominic Gerlach, Peng Shen, Shigenori Ueda, Takako Kimura, Christian Dussarrat, Toyohiro Chikyow},
  publisher = {Elsevier BV},
  year = {2024-03-19},
  keywords = {Fluorination, Surface passivation, hard X-ray photoelectron spectroscopy, Gallium nitride}
}