# Calculation of Electron Inelastic Mean Free Paths (IMFPs). VII. Reliability of the TPP-2M IMFP Predictive Equation

https://mdr.nims.go.jp/datasets/ae2a9fdd-62b2-4b92-bd45-df14c2c70252

## File

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## Id

ae2a9fdd-62b2-4b92-bd45-df14c2c70252

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2021-11-09T03:36:26.227773Z

## Updated at

2022-10-02T16:54:38.387527Z

## Published at

2022-01-05T19:07:12.819301Z

## Doi

https://doi.org/10.48505/nims.3237

## First published url

https://doi.org/10.1002/sia.1526

## Date published

2003-02-11

## Recorded date published

2003-3

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Calculation of Electron Inelastic Mean Free Paths (IMFPs). VII. Reliability
    of the TPP-2M IMFP Predictive Equation
  title_type: original
  lang: en

## Description

- description: 'We report comparisons of electron inelastic mean free paths (IMFPs)
    determined from our predictive IMFP equation TPP-2M and reference IMFPs calculated
    from optical data. These comparisons were made for values of the parameter Nv
    (the number of valence electrons per atom or molecule) that we have recommended
    and those that were recommended in a recent paper by Seah et al. [Surf. Interface
    Anal. 31, 778 (2001)]. The comparisons were made for eight elemental solids (K,
    Y, Gd, Tb, Dy, Hf, Ta, and Bi) and two compounds (KBr and Y2O3) for which there
    were appreciable differences in the recommended Nv values from the two sources
    and for which optical data were available for the IMFP calculations. The average
    of the root-mean-square (RMS) deviations for the ten materials between IMFPs from
    the TPP-2M equation with our Nv values and the reference IMFPs was 11.0 % while
    the corresponding average with the Seah et al. Nv values was 20.2 %. The larger
    average in the latter comparison was mainly due to large (> 20 %) RMS deviations
    for four materials (K, Hf, Ta, and KBr). For the other six materials, the RMS
    deviations with the Seah et al. values of Nv were similar to those with our values
    of Nv. Based on the comparisons for these ten materials, we believe it is preferable
    to use our values of Nv in the TPP-2M equation. '
  description_type: abstract
  lang: en

## Creator

- name: Tanuma, Shigeo
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941
- name: Powell, C. J.
  role: author
  orcid: https://orcid.org/0000-0001-8990-2286
- name: Penn, D. R.
  role: author

## Contact agent



## Publisher

organization: Wiley

## Managing organization



## Keyword

- subject: IMFP
  schema: not_defined
- subject: TPP-2M
  schema: not_defined
- subject: number of valence electrons
  schema: not_defined
- subject: elemental solids
  schema: not_defined
- subject: XPS
  schema: not_defined
- subject: electron inelastic mean free paths
  schema: not_defined
- subject: surface sensitivity
  schema: not_defined
- subject: IMFPs
  schema: not_defined
- subject: AES
  schema: not_defined
- subject: surface analysis
  schema: not_defined

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## Fileset

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  filename: IMFP_VII_pv.pdf
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  size: 424209
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- id: 71f7fe14-10d5-463c-b526-2e48deb7e05a
  filename: Figures.pdf
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## Thumbnail

fileset_id: 71f7fe14-10d5-463c-b526-2e48deb7e05a
filename: Figures.pdf