# Single-Crystal Diamond MEMS Magnetic Sensor

https://mdr.nims.go.jp/datasets/adf4df76-1605-4501-ad3f-e1688ba66daa

## File

- [Revised chapter-20230509 -new.docx](https://mdr.nims.go.jp/filesets/cefa5ec0-54b8-4f0b-9723-ae3bc53572a4/download) ([Detail](https://mdr.nims.go.jp/filesets/cefa5ec0-54b8-4f0b-9723-ae3bc53572a4.md))

## Id

adf4df76-1605-4501-ad3f-e1688ba66daa

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-07-08T07:28:13.934755Z

## Updated at

2024-10-21T03:30:45.915691Z

## Published at

2024-10-21T03:30:46.038907Z

## Doi

https://doi.org/10.48505/nims.4876

## First published url

https://link.springer.com/chapter/10.1007/978-3-031-47556-6_14

## Date published

2024-05-22

## Recorded date published



## Resource type

book

## Manuscript type

authors_original

## Collection



## Title

- title: Single-Crystal Diamond MEMS Magnetic Sensor
  title_type: original
  lang: en

## Description

- description: Single-crystal diamond (SCD) is a promising material for high-performance
    and high-reliability micro-electromechanical system (MEMS) superior to other semiconductor
    materials (Si, III-nitrides, SiC, etc.,) in terms of the outstanding mechanical
    strength, thermal conductivity, and chemical inertness. In this chapter, we review
    our recent progress in diamond MEMS magnetic sensors by integrating a magneto-strictive
    galfenol (FeGa) thin film on SCD MEMS resona-tors for high-temperature conditions.
    The magnetic sensing mechanism of magnetic sensors is discussed. The thermal stability
    of the sensors is analyzed and the strategies to enhance the magnetic sensing
    performance of the magnetic sensors are described.
  description_type: abstract
  lang: eng

## Creator

- name: Zilong Zhang
  role: author
  orcid: https://orcid.org/0000-0002-9759-9253
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
  ror: https://ror.org/026v1ze26
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
  ror: https://ror.org/026v1ze26

## Contact agent



## Publisher

organization: Springer

## Managing organization



## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined
- subject: magnetic sensors
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

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## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Novel Aspects of Diamond II
  start_page: 409
  end_page: 443

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## Specimen



## Chemical composition



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## Fileset

- id: cefa5ec0-54b8-4f0b-9723-ae3bc53572a4
  filename: Revised chapter-20230509 -new.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 40301218
  md5: 9ff2fc5105f72d18da07e9ebf8b3eaa6

## Thumbnail

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filename: Revised chapter-20230509 -new.docx