@misc{s2024a, title = {Planar-type SiGe thermoelectric generator with double cavity structure}, author = {S. Koike, R. Yanagisawa, L. Jalabert, R. Anufriev, M. Kurosawa, T. Mori, M. Nomura}, publisher = {AIP Publishing}, year = {2024-03-18}, keywords = {thermoelectric} }