@misc{jun2024a,
  title = {Effect of sequential N ion implantation in the formation of a shallow Mg-implanted p-type GaN layer},
  author = {Jun Uzuhashi, Jun Chen, Ryo Tanaka, Shinya Takashima, Masaharu Edo, Tadakatsu Ohkubo, Takashi Sekiguchi},
  publisher = {American Institute of Physics},
  year = {2024-08-07},
  keywords = {gallium nitride, atom probe tomography, transmission electron microscopy, cathodoluminescence}
}