# 表面分析における電子の非弾性散乱

https://mdr.nims.go.jp/datasets/a8d8cbe2-f25b-4b50-a91c-c74ef7abd0e5

## File

- [2023 Tanuma_VSS AM.pdf](https://mdr.nims.go.jp/filesets/7d161846-bb17-4e4b-ae9c-897c46675da5/download) ([Detail](https://mdr.nims.go.jp/filesets/7d161846-bb17-4e4b-ae9c-897c46675da5.md))

## Id

a8d8cbe2-f25b-4b50-a91c-c74ef7abd0e5

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-05-12T01:00:47.622717Z

## Updated at

2024-01-05T13:13:05.403026Z

## Published at

2023-05-12T05:32:55.472381Z

## Doi

https://doi.org/10.48505/nims.3962

## First published url

https://doi.org/10.1380/vss.66.292

## Date published

2023-05-10

## Recorded date published

2023

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: 表面分析における電子の非弾性散乱
  title_type: original
  lang: ja
- title: Electron inelastic scattering in Surface Analysis
  title_type: alternative
  lang: en

## Description

- description: "This paper describes the recent progress in electron inelastic mean
    free paths (IMFPs) calculations with the dielectric response function and the
    optical energy loss function (ELF) as key parameters. As a result, it has been
    found that for most materials, the IMFP values calculated by the various calculation
    algorithms agreed well each other in the energy region above 300 eV. However,
    there is a large difference in the energies under 200 eV. The energy dependence
    of IMFPs calculated from optical ELFs could be expressed by the modified Bethe
    equation in the energies between 50 eV and 200 keV. The material dependence of
    IMFPs could be expressed by the TPP -2M equation. For IMFP calculations, the treatments
    and evaluations of the electron exchange effect, the effect of energy gap in the
    energy loss function, and the associated integral region also remain important
    issues to be addressed in the future. \r\n\r\n"
  description_type: abstract
  lang: jpn

## Creator

- name: 田沼繁夫
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941
  organization: 技術開発・共用部門
  department: 運営室

## Contact agent



## Publisher

organization: Surface Science Society Japan

## Managing organization



## Keyword

- subject: electron inelastic mean free path
  schema: not_defined
- subject: dielectric function model
  schema: not_defined
- subject: energy loss function
  schema: not_defined
- subject: modified Bethe equation
  schema: not_defined
- subject: IMFP
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Vacuum and Surface Science
  issn: '24335843'
  volume: '66'
  issue: '5'
  start_page: 292
  end_page: 298

## Conference



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## Instrument



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## Measurement method



## Specimen



## Chemical composition



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## Fileset

- id: 7d161846-bb17-4e4b-ae9c-897c46675da5
  filename: 2023 Tanuma_VSS AM.pdf
  content_type: application/pdf
  size: 1537682
  md5: b6f18502231b82ec2f61eba94fc863a0

## Thumbnail

fileset_id: 7d161846-bb17-4e4b-ae9c-897c46675da5
filename: 2023 Tanuma_VSS AM.pdf