# メタルレジストのEUV露光による反応メカニズム及び大気安定性

https://mdr.nims.go.jp/datasets/a8613b49-f6d7-4b6a-8e0b-af617d5a1f47

## File

- [投稿_240514.pdf](https://mdr.nims.go.jp/filesets/f84b15f3-e20a-44d0-a0e6-d16d92599a49/download) ([Detail](https://mdr.nims.go.jp/filesets/f84b15f3-e20a-44d0-a0e6-d16d92599a49.md))

## Id

a8613b49-f6d7-4b6a-8e0b-af617d5a1f47

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-10-01T23:31:49.705012Z

## Updated at

2024-12-02T07:31:00.482538Z

## Published at

2024-12-02T07:31:00.583045Z

## Doi

https://doi.org/10.48505/nims.5069

## First published url

https://www.gijutu.co.jp/doc/magazine/at_2024_08.htm

## Date published



## Recorded date published

2024年8月

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: メタルレジストのEUV露光による反応メカニズム及び大気安定性
  title_type: original
  lang: ja

## Description

- description: メタルレジストのEUV露光の反応メカニズムと大気中安定生に関して調べた結果を報告した。
  description_type: abstract
  lang: jpn

## Creator

- name: 山下 良之
  role: author
  orcid: https://orcid.org/0000-0003-0994-8095
  organization: 物質・材料研究機構
  department: 電子・光機能材料研究センター/機能材料分野/ナノ電子デバイス材料グループ
  ror: https://ror.org/026v1ze26

## Contact agent



## Publisher

organization: 技術情報協会

## Managing organization



## Keyword

- subject: メタルレジスト
  schema: not_defined
- subject: EUV
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

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## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: 車載テクノロジー
  issn: '24325694'
  volume: '11'
  issue: '11'
  start_page: 1
  end_page: 6

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## Measurement method



## Specimen



## Chemical composition



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## Fileset

- id: f84b15f3-e20a-44d0-a0e6-d16d92599a49
  filename: 投稿_240514.pdf
  content_type: application/pdf
  size: 1166061
  md5: b374f78955b6485809366ffd13a6ac59

## Thumbnail

fileset_id: f84b15f3-e20a-44d0-a0e6-d16d92599a49
filename: 投稿_240514.pdf