# Study on thermoelectric property optimization of mixed-phase bismuth telluride thin films deposited by co-evaporation process

https://mdr.nims.go.jp/datasets/a77c0743-003c-4c21-97c5-1d51e2da9972

## File

- [Surface & Coatings Technology.pdf](https://mdr.nims.go.jp/filesets/4f6ae294-4832-40c9-b2aa-8446e6faca1d/download) ([Detail](https://mdr.nims.go.jp/filesets/4f6ae294-4832-40c9-b2aa-8446e6faca1d.md))

## Id

a77c0743-003c-4c21-97c5-1d51e2da9972

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-03-13T07:56:38.845620Z

## Updated at

2024-01-05T13:13:04.544332Z

## Published at

2023-03-20T07:09:36.590784Z

## Doi



## First published url

https://doi.org/10.1016/j.surfcoat.2020.125694

## Date published

2020-03-26

## Recorded date published

2020-7

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Study on thermoelectric property optimization of mixed-phase bismuth telluride
    thin films deposited by co-evaporation process
  title_type: original
  lang: en

## Description

- description: The development of Bi2Te3 thin films has huge potential in the pursuit
    of efficient thermoelectric micro/nanodevices due to their high Seebeck coefficient,
    high electrical conductivity and low thermal conductivity. The optimization of
    experimental parameters of BiTe thin films produced by co-evaporation will be
    investigated in this study. Co-evaporation is a low cost, easy-to-control process
    which can be used for high throughput and is scalable. We found that an optimal
    Te/Bi ratio of 1.5 with good thermoelectric properties can be directly synthesized
    by Bi and Bi2Te3 co-evaporation. Compared to the conventional Bi/Te co-evaporation
    process, high temperature annealing or substrate heating is not necessary for
    the process mentioned in this paper, which is a desirable feature when using polymer-based
    substrates, organic/inorganic hybrid thermoelectric generators, and flexible devices
    since they have relatively low tolerance to heat. The optimized Bi2Te3 thin films,
    which are mixed phases of Bi2Te3, Bi3Te4 and Te, possess high carrier concentration
    (6.65 × 1020 cm−3), low electrical resistivity (3.17 × 10−3 Ωcm), and extremely
    low thermal conductivity (0.59 W/mK) at room temperature on a smooth surface (roughness
    <5.5 nm) and are achieved by adjusting the deposition rate of Bi and Bi2Te3. The
    correlation between the structures of mixed phases, electrical and thermal properties
    will be discussed in detail.
  description_type: abstract
  lang: eng

## Creator

- name: Yen-Ju Wu
  role: author
  orcid: https://orcid.org/0000-0003-2647-3407
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Shih-Chieh Hsu
  role: author
- name: Ya-Cheng Lin
  role: author
- name: Yibin Xu
  role: author
  orcid: https://orcid.org/0000-0001-8600-8748
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Tung-Han Chuang
  role: author
- name: Sheng-Chi Chen
  role: author

## Contact agent



## Publisher

organization: Elsevier BV

## Managing organization



## Keyword

- subject: Bi2Te3, Thermoelectric properties, Co-evaporation, Thin films, Mixed phases
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



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## Embargo



## Journal

- title: SURFACE & COATINGS TECHNOLOGY
  issn: '02578972'
  volume: '394'
  start_page: 125694
  end_page: 125694

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## Fileset

- id: 4f6ae294-4832-40c9-b2aa-8446e6faca1d
  filename: Surface & Coatings Technology.pdf
  content_type: application/pdf
  size: 3799108
  md5: 84c7108c3914b1c03146766ec88552f2

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filename: Surface & Coatings Technology.pdf