# Experimental Determination of Electron Inelastic Mean Free Paths in 13 Elemental Solids in the 50 eV to 5000 eV Energy Range by Elastic-Peak Electron Spectroscopy

https://mdr.nims.go.jp/datasets/a735a079-00af-41f6-9dc5-3e60b67ba88b

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## Id

a735a079-00af-41f6-9dc5-3e60b67ba88b

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2021-10-13T13:29:41.744391Z

## Updated at

2024-01-05T13:13:04.128732Z

## Published at

2021-11-16T10:26:09.699971Z

## Doi

https://doi.org/10.48505/nims.3058

## First published url

https://doi.org/10.1002/sia.2102

## Date published

2005-10-31

## Recorded date published

2005-11

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Experimental Determination of Electron Inelastic Mean Free Paths in 13 Elemental
    Solids in the 50 eV to 5000 eV Energy Range by Elastic-Peak Electron Spectroscopy
  title_type: original
  lang: en

## Description

- description: We have determined electron inelastic mean free paths (IMFPs) in C
    (graphite), Si, Cr, Fe, Cu, Zn, Ga, Mo, Ag, Ta, W, Pt and Au by elastic-peak electron
    spectroscopy (EPES) using Ni as a reference material for electron energies between
    50 eV and 5000 eV.  These IMFPs could be fitted by the simple Bethe equation for
    inelastic electron scattering in matter for energies from 100 eV to 5000 eV. The
    average root-mean-square (RMS) deviation in these fits was 9 %. The IMFPs for
    Si, Cr, Fe, Cu, Ag, Ta, W, Pt and Au were in excellent agreement with the corresponding
    values calculated from optical data for energies between 100 eV and 5000 eV. While
    the RMS differences for graphite and Mo in these comparisons were large (27 %
    and 17 %, respectively), the average RMS difference for the eleven elements was
    11 %. Similar comparisons were made between our IMFPs and values obtained from
    the TPP-2M predictive equation for energies between 100 eV and 5000 eV, and an
    average RMS difference for the thirteen solids was 10.7 %; in these comparisons,
    the RMS differences for Ta and W were relatively large (26 % for each). A correction
    for surface-electronic excitations was calculated from a formula of Werner et
    al.; except for Si and Ga, the average correction was 5 % for energies between
    150 eV and 5000 eV. The satisfactory consistency between the IMFPs from our EPES
    experiments and the corresponding IMFPs computed from optical data indicates that
    the uncertainty of these IMFPs is about 11 % for electron energies between 100
    eV and 5000 eV. Similar comparisons with IMFPs from the EPES experiments of Werner
    et al. showed a consistency of 8 % for energies between 200 eV and 5000 eV.
  description_type: abstract
  lang: en

## Creator

- name: Tanuma, Shigeo
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941
- name: Shiratori, T
  role: author
- name: Kimura, Takashi
  role: author
- name: Goto, Keisuke
  role: author
- name: Ichimura, Shingo
  role: author
- name: Powell, Cedric J
  role: author

## Contact agent



## Publisher

organization: Wiley

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## Keyword

- subject: Monte Carlo simulation
  schema: not_defined
- subject: electron inelastic mean free paths
  schema: not_defined
- subject: experimental determination
  schema: not_defined
- subject: elastic- peak electron spectroscopy
  schema: not_defined

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## Fileset

- id: 86fd2361-98d1-496f-ad16-38606813a8ea
  filename: 05_Tanuma_EPES_T_F.pdf
  content_type: application/pdf
  size: 1991300
  md5: b35853836c11307c826d9d9424513a45

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