# Bayesian inference method utilizing SESSA in quantitative layer structure estimation from XPS data

https://mdr.nims.go.jp/datasets/a7136889-1aaa-48a8-95f9-e30132a984ca

## File

- [2024_Machida_JES_273_147499.pdf](https://mdr.nims.go.jp/filesets/ef92848c-0069-4bcb-9309-bb5d1e858876/download) ([Detail](https://mdr.nims.go.jp/filesets/ef92848c-0069-4bcb-9309-bb5d1e858876.md))

## Id

a7136889-1aaa-48a8-95f9-e30132a984ca

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-11-07T06:55:48.970729Z

## Updated at

2025-11-10T03:30:27.867175Z

## Published at

2025-11-10T03:24:32.553884Z

## Doi



## First published url

https://doi.org/10.1016/j.elspec.2024.147449

## Date published

2024-05-29

## Recorded date published

2024-6

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Bayesian inference method utilizing SESSA in quantitative layer structure
    estimation from XPS data
  title_type: original
  lang: en

## Description

- description: We propose a method that combines Bayesian inference with simulation
    of electron spectra for surface analysis (SESSA) to infer layer structures from
    XPS data. SESSA simulates XPS spectra for specified compositions and microstructures,
    producing highly reproducible results. Our method estimates the layer structure
    based on posterior probability distributions, applicable to both wide-scan and
    narrow-scan data without angle resolution. This approach allows for quantitative
    analysis of layer structure information in XPS measurements.
  description_type: abstract
  lang: und

## Creator

- name: Atsushi Machida
  role: author
- name: Kenji Nagata
  role: author
  orcid: https://orcid.org/0000-0001-9894-4461
  organization: National Institute for Materials Science
- name: Ryo Murakami
  role: author
  orcid: https://orcid.org/0000-0001-8585-9268
  organization: National Institute for Materials Science
- name: Hiroshi Shinotsuka
  role: author
  orcid: https://orcid.org/0000-0001-5147-1396
  organization: National Institute for Materials Science
- name: Hayaru Shouno
  role: author
- name: Hideki Yoshikawa
  role: author
  orcid: https://orcid.org/0000-0002-7389-8865
  organization: National Institute for Materials Science
- name: Masato Okada
  role: author

## Contact agent



## Publisher

organization: Elsevier BV

## Managing organization



## Keyword

- subject: X-ray photoelectron spectroscopy
  schema: not_defined
- subject: Bayesian estimation
  schema: not_defined
- subject: Exchange Monte Carlo method
  schema: not_defined
- subject: SESSA
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Journal of Electron Spectroscopy and Related Phenomena
  issn: '03682048'
  volume: '273'
  article_number: '147449'

## Conference



## Related item



## Funding

- identifier: JPMJCR1761
  funder_name: Core Research for Evolutional Science and Technology
- funder_name: Japan Science and Technology Agency
- identifier: JP23KJ0471
  funder_name: Japan Society for the Promotion of Science
- identifier: JP23H00486
  funder_name: Japan Society for the Promotion of Science

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: ef92848c-0069-4bcb-9309-bb5d1e858876
  filename: 2024_Machida_JES_273_147499.pdf
  content_type: application/pdf
  size: 2262071
  md5: 5d6fb778be45bb95e3acab1ab68c7dfe

## Thumbnail

fileset_id: ef92848c-0069-4bcb-9309-bb5d1e858876
filename: 2024_Machida_JES_273_147499.pdf