# オージェ電子分光法における背面散乱補正　I．広い分析条件で使用可能な電子の背面散乱補正式の開発

https://mdr.nims.go.jp/datasets/a545030f-8129-4428-a471-29b3a709464c

## File

- [07 Vol.14 No.1 9-19.pdf](https://mdr.nims.go.jp/filesets/a974a14a-1b70-40c2-9a89-6e5b34352258/download) ([Detail](https://mdr.nims.go.jp/filesets/a974a14a-1b70-40c2-9a89-6e5b34352258.md))

## Id

a545030f-8129-4428-a471-29b3a709464c

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-06-23T08:17:33.361099Z

## Updated at

2024-01-05T13:13:01.929312Z

## Published at

2023-06-29T04:30:18.997930Z

## Doi



## First published url

https://doi.org/10.1384/jsa.14.9

## Date published

2018-10-19

## Recorded date published

2007

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: オージェ電子分光法における背面散乱補正　I．広い分析条件で使用可能な電子の背面散乱補正式の開発
  title_type: original
  lang: ja
- title: Backscattering Correction for Auger electron spectroscopy.I. Development
    of an improved backscattering correction equation for wide analytical conditions.
  title_type: alternative
  lang: en

## Description

- description: AESによる表面定量分析において重要な電子の背面散乱について検討した．電子の背面散乱係数の入射角度依存性，およびそのエネルギーの平均値および中央値について，モンテカルロ(MC)法を用いてBe,
    B, C, Al, Si, Cu, Zr, Ag, La, Auの10種類の元素について検討し，電子の背面散乱係数の入射角度依存性を明らかにした．この電子の背面散乱係数をもちいて，加速電圧3-
    30keV，電子線入射角度0 - 60度で使用可能な背面散乱補正係数の一般式を開発した．ここで提案した背面散乱補正係数の一般式は広いエネルギー範囲，広い電子線入射角度で使用することができる考えられる．
  description_type: abstract
  lang: jpn

## Creator

- name: 田沼 繁夫
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941
  organization: 物質・材料研究機構
  department: 分析支援ステーション
  ror: https://ror.org/026v1ze26

## Contact agent



## Publisher

organization: 一般社団法人　表面分析研究会

## Managing organization



## Keyword

- subject: Auger electron spectroscopy
  schema: not_defined
- subject: AES
  schema: not_defined
- subject: electron backscattering correction
  schema: not_defined
- subject: predictive formula for back scattering correction
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: JOURNAL OF SURFACE ANALYSIS
  issn: '13411756'
  volume: '14'
  issue: '1'
  start_page: 9
  end_page: 19

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## Fileset

- id: a974a14a-1b70-40c2-9a89-6e5b34352258
  filename: 07 Vol.14 No.1 9-19.pdf
  content_type: application/pdf
  size: 3475869
  md5: fe5b62439395b6827b9df739ee26d1ef

## Thumbnail

fileset_id: a974a14a-1b70-40c2-9a89-6e5b34352258
filename: 07 Vol.14 No.1 9-19.pdf