# Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage

https://mdr.nims.go.jp/datasets/a5392b2c-4135-4115-b315-0ab51718377e

## File

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## Id

a5392b2c-4135-4115-b315-0ab51718377e

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2021-10-13T13:29:41.454061Z

## Updated at

2022-10-02T16:53:08.884803Z

## Published at

2021-11-16T10:30:53.718663Z

## Doi



## First published url

https://doi.org/10.1380/jsssj.13.8_472

## Date published

2011-06-10

## Recorded date published

1992

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy.
    Effects of Zalar Rotation and Liquid Nitrogen Cold Stage
  title_type: original
  lang: en

## Description

- description: We have investigated the Auger depth profiling analysis of InP/GaInAsP
    multilayer specimens. It is difficult to obtain the Auger depth profile of InP
    sample by argon ion sputtering because it causes a great increase in surface roughness
    of the specimens. In order to reduce the roughness caused by the argon ion bombardment,
    the Zalar rotation method and sample cooling method were applied to the depth
    profile analysis of InP/GaInAsP specimens. The ion species used for sputtering
    was Ar+. Ar+ accelerating voltage was 1.0 kV. The electron accelerating voltage
    was 5 keV, the beam current was 0.1uA and measured Auger lines were In-MNN, P-LVV,
    Ga-LMM and As-LMM. The Zalar rotation method gave good results in the depth profiling
    of In-MNN and P-LVV. The surface roughness was observed by SEM. On the other hand,
    the sample cooling liquid nitrogen temperature gave excellent analytical results
    the depth resolution was about 80A at the depth of 4600A. We found few cones on
    the sample surface after depth profiling analysis using the sample cooling method.
  description_type: abstract
  lang: en

## Creator

- name: Ogiwara, Toshiya
  role: author
  orcid: https://orcid.org/0000-0002-7376-6571
- name: Tanuma, Shigeo
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941
- name: Nagasawa, Yuji
  role: author
- name: Ikeo, Nobuyuki
  role: author

## Contact agent



## Publisher

organization: Surface Science Society of Japan

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## Keyword

- subject: Auger Depth Profiling Analysis
  schema: not_defined
- subject: InP/GaInAsP Multilayers
  schema: not_defined
- subject: Zalar Rotation  Method
  schema: not_defined
- subject: Sample Cooling Method
  schema: not_defined

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## Fileset

- id: 877ffc2c-f6b9-4427-97dd-2db2a1c933f8
  filename: 表面科学_13_1992_472.pdf
  content_type: application/pdf
  size: 9517270
  md5: fd740b641a62a77cdea1b6f67348a287

## Thumbnail

fileset_id: 877ffc2c-f6b9-4427-97dd-2db2a1c933f8
filename: 表面科学_13_1992_472.pdf