@misc{jun2025a,
  title = {Experimental investigation and simulation of SEM image intensity behaviors for developing thickness-controlled S/TEM lamella preparation via FIB-SEM},
  author = {Jun Uzuhashi, Yuanzhao Yao, Tadakatsu Ohkubo, Takashi Sekiguchi},
  publisher = {Oxford University Press (OUP)},
  year = {2025-08-01},
  keywords = {transmission electron microscopy, scanning electron microscopy, focused ion beam}
}