# Crystal Structure Modification and Dielectric Properties of Sr- and La-Containing A<sub>2</sub>B<sub>2</sub>O<sub>7</sub> Thin Films for High-Temperature Operational Film Capacitors

https://mdr.nims.go.jp/datasets/a0e0cb82-5b84-474d-a288-f4448cf6d335

## Files

- [44-murata_Layered perovskite_ACS omega.pdf](https://mdr.nims.go.jp/filesets/e6f0c48a-048a-4a80-8de4-e6ffa81af201/download) ([Detail](https://mdr.nims.go.jp/filesets/e6f0c48a-048a-4a80-8de4-e6ffa81af201.md))

## Id

a0e0cb82-5b84-474d-a288-f4448cf6d335

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-10-09T05:23:39.372633Z

## Updated at

2024-10-10T07:30:46.311677Z

## Published at

2024-10-10T07:30:46.417239Z

## Doi



## First published url

https://doi.org/10.1021/acsomega.4c00788

## Date published

2024-06-18

## Recorded date published

2024-6-18

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Crystal Structure Modification and Dielectric Properties of Sr- and La-Containing
    A<sub>2</sub>B<sub>2</sub>O<sub>7</sub> Thin Films for High-Temperature Operational
    Film Capacitors
  title_type: original
  lang: en

## Description

- description: To obtain thermally stable high-dielectric-constant thin-film materials,
    A2B2O7 thin films (Sr2Ta2O7, Sr2Nb2O7, La2Zr2O7, and La2Ti2O7) containing Sr or
    La and their solid solutions were grown on Pt/Ti/SiO2/Si substrates by RF sputtering
    and their crystal structures and dielectric properties were investigated. The
    Sr2Ta2O7 and La2Ti2O7 films exhibit highly oriented crystal structures. By contrast,
    the Sr2Nb2O7 and La2Zr2O7 films exhibit polycrystalline structures. The leakage
    properties of the Sr-containing films are lower and more stable in the high-temperature
    region (to 300 oC) than those of the La-containing films. Among the investigated
    films, the Sr2Ta2O7 film grown at 500 oC and annealed at 900 oC shows the most
    stable dielectric constant with respect to temperature in the temperature range
    from room temperature to 300 oC. In addition, the xSr2Ta2O7–(1−x)La2Ti2O7 solid
    solutions exhibit enhanced dielectric properties at x = 0.35. The dielectric constant
    is greater than 100, and its variation with temperature is less than 10%. The
    Sr-containing A2B2O7 ferroelectric thin films have potential applications as high-temperature
    film capacitors that can operate at temperatures as high as 300 oC.
  description_type: abstract
  lang: und

## Creator

- name: Takahiro Nagata
  role: author
  orcid: https://orcid.org/0000-0002-8591-2943
- name: Toyohiro Chikyow
  role: author
  orcid: https://orcid.org/0000-0003-3860-4806
- name: Akira Ando
  role: author

## Contact agent



## Publisher

organization: American Chemical Society (ACS)

## Managing organization



## Keyword

- subject: dielectrics
  schema: not_defined
- subject: layered perovskite
  schema: not_defined
- subject: pyrochlore
  schema: not_defined
- subject: film capacitor
  schema: not_defined
- subject: combinatorial method
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc-nd/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: ACS Omega
  issn: '24701343'
  volume: '9'
  issue: '24'
  start_page: 25968
  end_page: 25975

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



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## Custom property



## Fileset

- id: e6f0c48a-048a-4a80-8de4-e6ffa81af201
  filename: 44-murata_Layered perovskite_ACS omega.pdf
  content_type: application/pdf
  size: 8969626
  md5: 87a33d39c46d09bcb8fe73a5a1cd4d2b

## Thumbnail

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filename: 44-murata_Layered perovskite_ACS omega.pdf