# Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature

https://mdr.nims.go.jp/datasets/9f02a54a-4aa8-4d1e-9c09-e6fa0fc0961d

## File

- [Zhang_MEMS2025_202415-submit.docx](https://mdr.nims.go.jp/filesets/355a573b-5ce5-47e0-9a41-dfa3c6a14446/download) ([Detail](https://mdr.nims.go.jp/filesets/355a573b-5ce5-47e0-9a41-dfa3c6a14446.md))

## Id

9f02a54a-4aa8-4d1e-9c09-e6fa0fc0961d

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-11-11T06:52:57.956619Z

## Updated at

2025-11-13T07:30:04.324485Z

## Published at

2025-11-13T07:24:29.135500Z

## Doi

https://doi.org/10.48505/nims.5904

## First published url

https://doi.org/10.1109/mems61431.2025.10917760

## Date published

2025-01-19

## Recorded date published

2025-1-19

## Resource type

conference_paper

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature
  title_type: original
  lang: en

## Description

- description: 'This paper presents a pioneering smart magnetic force sensor that
    combines a single-crystal diamond (SCD) MEMS resonator with a permanent magnetic
    particle through magnetic field gradient effect, enabling detection of ultraweak
    magnetic forces down to the femtonewton (fN) range. The sensor exhibits exceptional
    sensitivity of 7.15×103 ppm/(mT/mm) and low frequency fluctuation of 8.95×10-5
    Hz, along with a rapid response time of 12.5 ms, making it suitable for high-precision
    measurements. Its design and functionality make it well-suited for diverse applications,
    from ultra-sensitive magnetic detection to innovative applications in miniaturized
    sensing systems. '
  description_type: abstract
  lang: und

## Creator

- name: Zilong Zhang
  role: author
- name: Zhijian Zhao
  role: author
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
- name: Takahito Ono
  role: author
- name: Masaya Toda
  role: author

## Contact agent



## Publisher

organization: IEEE

## Managing organization



## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined
- subject: magnetic sensors
  schema: not_defined

## Rights

- description: "© 2025 IEEE.  Personal use of this material is permitted.  Permission
    from IEEE must be obtained for all other uses, in any current or future media,
    including reprinting/republishing this material for advertising or promotional
    purposes, creating new collective works, for resale or redistribution to servers
    or lists, or reuse of any copyrighted component of this work in other works."
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems
    (MEMS)
  issn: '21601968'
  start_page: 971
  end_page: 974

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 355a573b-5ce5-47e0-9a41-dfa3c6a14446
  filename: Zhang_MEMS2025_202415-submit.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 2374033
  md5: d7995d4bb670357e33b03cfc7085c41e

## Thumbnail

fileset_id: 355a573b-5ce5-47e0-9a41-dfa3c6a14446
filename: Zhang_MEMS2025_202415-submit.docx