# 20.1 A 3.5×3.5mm<sup>2</sup> 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack

https://mdr.nims.go.jp/datasets/9d8ce3cd-bbb6-41f3-9a25-6116d26e97e2

## File

- [manuscript.pdf](https://mdr.nims.go.jp/filesets/3e07731a-564e-4edc-b17d-059a27fb4a7a/download) ([Detail](https://mdr.nims.go.jp/filesets/3e07731a-564e-4edc-b17d-059a27fb4a7a.md))

## Id

9d8ce3cd-bbb6-41f3-9a25-6116d26e97e2

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-12-23T08:10:39.121654Z

## Updated at

2025-12-25T07:21:05.976381Z

## Published at

2025-12-25T23:19:21.956079Z

## Doi

https://doi.org/10.48505/nims.6077

## First published url

https://doi.org/10.1109/isscc49661.2025.10904647

## Date published

2025-02-16

## Recorded date published

2025-2-16

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: 20.1 A 3.5×3.5mm<sup>2</sup> 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous
    Multi-Modal-Gas-Sensor Chip Stack
  title_type: original
  lang: en

## Description

- description: Miniaturizing and reducing the power consumption of multi-modal gas
    sensors with multiple channels can enable a wide array of applications, including
    integrating with wearable devices for daily breath analysis, encapsulation into
    ingestible pills for internal body measurements, and embedding into smart tags
    for food freshness management (Fig. 20.1.1). Traditional gas sensors typically
    have the transducer and CMOS chip connected via wiring on a substrate, leading
    to a large-form factor that requires complicated and expensive packaging and cannot
    readily scale to many-sensor arrays [1]. Recent studies have proposed gas sensors
    utilizing a MEMS-CMOS stack; however, these have yet to demonstrate responses
    to different gas types, and there are also challenges regarding increasing the
    number of channels and reducing the power consumption [2]. In this paper, we propose
    a heterogeneous multi-modal gas sensor that employs a Membrane-type Surface-stress
    Sensor (MSS) as the transducer stacked on top of CMOS for analog frontend and
    digital readout.
  description_type: abstract
  lang: und

## Creator

- name: Kotaro Naruse
  role: author
- name: Naru Kato
  role: author
- name: Takuma Matsumori
  role: author
- name: Jun Shlomi
  role: author
- name: Yoshihiro Midoh
  role: author
- name: Tetsuya Hirose
  role: author
- name: Gaku Imamura
  role: author
  orcid: https://orcid.org/0000-0002-3130-7190
  organization: National Institute for Materials Science
- name: Genki Yoshikawa
  role: author
  orcid: https://orcid.org/0000-0002-9136-8964
  organization: National Institute for Materials Science
- name: Constantine Sideris
  role: author
- name: Noriyuki Miura
  role: author

## Contact agent



## Publisher

organization: IEEE

## Managing organization



## Keyword

- subject: gas sensor
  schema: not_defined
- subject: CMOS
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- description: "© 2025 IEEE.  Personal use of this material is permitted.  Permission
    from IEEE must be obtained for all other uses, in any current or future media,
    including reprinting/republishing this material for advertising or promotional
    purposes, creating new collective works, for resale or redistribution to servers
    or lists, or reuse of any copyrighted component of this work in other works.\r\n"
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Digest of Technical Papers - IEEE International Solid-State Circuits Conference
  issn: '01936530'
  volume: '68'
  start_page: 348
  end_page: 350

## Conference



## Related item



## Funding

- identifier: JPMJKB2307
  funder_name: JST
  description: 世界のトップ研究者ネットワーク参画のための国際研究協力プログラム

## Instrument



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## Specimen



## Chemical composition



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## Fileset

- id: 3e07731a-564e-4edc-b17d-059a27fb4a7a
  filename: manuscript.pdf
  content_type: application/pdf
  size: 93259
  md5: 3258c41249b51cdc06dc52d0531e6d2c

## Thumbnail

fileset_id: 3e07731a-564e-4edc-b17d-059a27fb4a7a
filename: manuscript.pdf