@misc{takayoshi2026a,
  title = {Tetramethylammonium hydroxide (TMAH) treatment of dry-etched trenches on (010) β-Ga2O3 to enhance trench profiles},
  author = {Takayoshi Oshima},
  publisher = {AIP Publishing},
  year = {2026-02-01},
  keywords = {Ga2O3, TMAH}
}