# Effect of Ultra-High Vacuum Annealing and Hydrogen Plasma Treatment on the Resonance Properties of Single-Crystal Diamond MEMS Cantilevers

https://mdr.nims.go.jp/datasets/9b1e1903-b6a1-4700-ae6c-a9711e7923fe

## File

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## Id

9b1e1903-b6a1-4700-ae6c-a9711e7923fe

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-10-10T10:10:12.602474Z

## Updated at

2026-10-13T07:46:48.606210Z

## Published at

2026-10-13T09:28:36.054748Z

## Doi

https://doi.org/10.48505/nims.8654

## First published url



## Date published



## Recorded date published



## Resource type

conference_paper

## Manuscript type

na

## Collection



## Title

- title: Effect of Ultra-High Vacuum Annealing and Hydrogen Plasma Treatment on the
    Resonance Properties of Single-Crystal Diamond MEMS Cantilevers
  title_type: original
  lang: en

## Description

- description: 'In this work, we investigated the effect of ultra-high vacuum annealing
    and hydrogen (H2) plasma treatment on the resonance properties of SCD MEMS cantilevers.
    The resonance frequency and Q factors were measured and analyzed after annealing
    from 900 to 1100℃ followed by H2 plasma treatment. Despite the annealing and plasma
    treatment, the resonance frequency of the SCD cantilevers well follows the inverse
    power law relationship with the length of different SCD MEMS cantilevers, revealing
    the excellent reliability of SCD MEMS, as shown in Fig.1 (a). It was found that
    the Q factors were markedly improved from the typical value around 8,000 to over
    15,000 after the annealing treatment at 1100℃ for 7 hours (Fig.1(b)). '
  description_type: abstract
  lang: eng

## Creator

- name: Guo Chen
  role: author
  orcid: https://orcid.org/0009-0004-9263-5616
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Zilong Zhang
  role: author
  orcid: https://orcid.org/0000-0002-9759-9253
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Liwen Sang
  role: author
  orcid: https://orcid.org/0000-0003-0946-1025
  organization: National Institute for Materials Science
  department: Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials
    Field/Thin Film Electronics Group
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

## Contact agent



## Publisher



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## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: 2023年第70回応用物理学会春季学術講演会
start_date: 2023-03-15
end_date: 2023-03-18
identifier: https://meeting.jsap.or.jp/archive/jsap2023s/

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## Fileset

- id: 4ada86e6-bf73-48c4-b0ab-8c7025745e8e
  filename: 講演予稿集 16p-A408-1.pdf
  content_type: application/pdf
  size: 381009
  md5: bb3eb5b5dcef1e529ee4ed7b5cbff40f

## Thumbnail

fileset_id: 4ada86e6-bf73-48c4-b0ab-8c7025745e8e
filename: 講演予稿集 16p-A408-1.pdf