# Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting

https://mdr.nims.go.jp/datasets/9b16b042-af57-4154-8e8a-9bd7016e710d

## File

- [表面科学_13_1992_606.pdf](https://mdr.nims.go.jp/filesets/02f06bda-9af1-4f1c-a0e7-e6477981804c/download) ([Detail](https://mdr.nims.go.jp/filesets/02f06bda-9af1-4f1c-a0e7-e6477981804c.md))

## Id

9b16b042-af57-4154-8e8a-9bd7016e710d

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2021-10-13T13:29:41.581516Z

## Updated at

2022-10-02T16:51:43.136828Z

## Published at

2021-11-16T10:30:53.842270Z

## Doi



## First published url

https://doi.org/10.1380/jsssj.13.10_606

## Date published

2011-06-10

## Recorded date published

1992

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum
    Method Using Non-Negative Least Square Curve Fitting
  title_type: original
  lang: en

## Description

- description: We have carried out the Auger depth profiling analysis of GaAs/AIAs
    multilayer structure using the peaks of GaMVV and A1LVV. Since the two peaks of
    the specimen overlapped each other, we made peak separation with peak synthesis
    technique using a non-negative least-square curve fit containing a peak-shift
    correction. The top-hat filtered spectra were used for the calculation to remove
    their background. This procedure gave excellent results for the peak separation
    especially for the sample which had a large difference in elemental concentration.
  description_type: abstract
  lang: en

## Creator

- name: OGIWARA, Toshiya
  role: author
  orcid: https://orcid.org/0000-0002-7376-6571
- name: TANUMA, Shigeo
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941

## Contact agent



## Publisher

organization: Surface Science Society of Japan

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## Keyword

- subject: peak separation
  schema: not_defined
- subject: non-negative least-square curve fit
  schema: not_defined
- subject: Auger depth profiling analysis
  schema: not_defined
- subject: GaAs/AlAs multilayer
  schema: not_defined

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## Fileset

- id: 02f06bda-9af1-4f1c-a0e7-e6477981804c
  filename: 表面科学_13_1992_606.pdf
  content_type: application/pdf
  size: 1796282
  md5: 5887fe65339300824b390ece4f6e1b2d

## Thumbnail

fileset_id: 02f06bda-9af1-4f1c-a0e7-e6477981804c
filename: 表面科学_13_1992_606.pdf