@misc{ogiwara2011a,
  title = {Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting},
  author = {OGIWARA, Toshiya, TANUMA, Shigeo},
  publisher = {Surface Science Society of Japan},
  year = {2011-06-10},
  keywords = {peak separation, non-negative least-square curve fit, Auger depth profiling analysis, GaAs/AlAs multilayer}
}