@misc{yuichi2020a, title = {Rapid growth of α-Ga2O3 by HCl-boosted halide vapor phase epitaxy and effect of precursor supply conditions on crystal properties}, author = {Yuichi Oshima, Katsuaki Kawara, Takayoshi Oshima, Mitsuru Okigawa, Takashi Shinohe}, publisher = {IOP Publishing}, year = {2020-05-01}, keywords = {α-Ga2O3, HVPE} }