# Effects of layer thickness and annealing process on low-frequency noise and detectivity in tunnel magnetoresistive sensors with CoFeSiB soft magnetic layers

https://mdr.nims.go.jp/datasets/94e6fd89-a8dc-429c-a953-b1e4c3e00f82

## File

- [Supplementary_Murali-Krishnan.pdf](https://mdr.nims.go.jp/filesets/69cfe046-0fb5-4935-bed9-5f440a961f14/download) ([Detail](https://mdr.nims.go.jp/filesets/69cfe046-0fb5-4935-bed9-5f440a961f14.md))
- [Murali_TMR_MDR.pdf](https://mdr.nims.go.jp/filesets/d53f44e0-34c9-45cf-b6a9-06f3c3a65ac3/download) ([Detail](https://mdr.nims.go.jp/filesets/d53f44e0-34c9-45cf-b6a9-06f3c3a65ac3.md))

## Id

94e6fd89-a8dc-429c-a953-b1e4c3e00f82

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-11-25T08:37:52.759813Z

## Updated at

2024-11-28T07:30:13.161533Z

## Published at

2024-11-28T07:30:14.320314Z

## Doi

https://doi.org/10.48505/nims.5029

## First published url

https://doi.org/10.1063/5.0231800

## Date published

2024-11-28

## Recorded date published

2024-11-28

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Effects of layer thickness and annealing process on low-frequency noise and
    detectivity in tunnel magnetoresistive sensors with CoFeSiB soft magnetic layers
  title_type: original
  lang: en

## Description

- description: We investigated the effects of the CoFeSiB soft magnetic layer thickness
    and annealing process on the magnetic field sensing and low-frequency 1/f noise
    characteristics of tunnel magnetoresistive (TMR) sensors. A thicker CoFeSiB layer
    improved the soft magnetic properties of the free layer, and the process order
    of device fabrication and annealing significantly influenced the 1/f noise characteristics
    of the TMR sensors. A magnetic field detectivity of 0.8 nT/Hz0.5 at 10 Hz was
    achieved in a single device TMR sensor annealed after the device fabrication,
    which suppressed both electrical and magnetic 1/f noise compared to the annealing
    performed before device fabrication. The spectral density of the 1/f noise voltage
    scaled linearly with the sensitivity of the sensor; thus, the detectivity showed
    an approximately constant value regardless of the change in sensitivity.
  description_type: abstract
  lang: und

## Creator

- name: Murali Krishnan Manikketh
  role: author
  orcid: https://orcid.org/0000-0002-6445-1121
- name: Prabhanjan D. Kulkarni
  role: author
  orcid: https://orcid.org/0000-0002-4605-5256
- name: Tomoya Nakatani
  role: author
  orcid: https://orcid.org/0000-0001-9590-216X
- name: Hirofumi Suto
  role: author
  orcid: https://orcid.org/0000-0003-4387-5862
- name: Yuya Sakuraba
  role: author
  orcid: https://orcid.org/0000-0003-4618-9550

## Contact agent



## Publisher

organization: AIP Publishing

## Managing organization



## Keyword

- subject: tunnel magnetoresistance
  schema: not_defined
- subject: soft magnetic
  schema: not_defined
- subject: magnetic sensor
  schema: not_defined
- subject: noise
  schema: not_defined
- subject: 1/f noise
  schema: not_defined

## Rights

- description: Copyright 2024 Author(s). This article is distributed under a Creative
    Commons Attribution (CC BY) License.
  identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Journal of Applied Physics
  issn: '00218979'
  volume: '136'
  issue: '20'

## Conference



## Related item



## Funding

- identifier: 24K00932
  funder_name: Japan Society for the Promotion of Science

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 69cfe046-0fb5-4935-bed9-5f440a961f14
  filename: Supplementary_Murali-Krishnan.pdf
  content_type: application/pdf
  size: 1376942
  md5: 718bb63c60f135510db6d72c15259d88
- id: d53f44e0-34c9-45cf-b6a9-06f3c3a65ac3
  filename: Murali_TMR_MDR.pdf
  content_type: application/pdf
  size: 1526992
  md5: 0415eaafc7e55d6b878347c0fe754ffb

## Thumbnail

fileset_id: d53f44e0-34c9-45cf-b6a9-06f3c3a65ac3
filename: Murali_TMR_MDR.pdf