@misc{jun2025a,
  title = {Observation of Atomic-Scale Structural Changes in Al<sub>2</sub>O<sub>3</sub>/GaN Interfacial Layers Prepared with a Dummy-SiO<sub>2</sub> Process},
  author = {Jun Uzuhashi, Yoshihiro Irokawa, Toshihide Nabatame, Tadakatsu Ohkubo, Yasuo Koide},
  publisher = {The Electrochemical Society},
  year = {2025-08-01},
  keywords = {transmission electron microscopy, metal-oxide-semiconductor}
}